Reducing intrinsic energy dissipation in diamond-on-diamond mechanical resonators toward one million quality factor
Reducing intrinsic energy dissipation in diamond-on-diamond mechanical resonators toward one million quality factor
复制标题
将金刚石对金刚石机械谐振器的固有能量耗散降低至 100 万品质因数
DOI：
10.1103/physrevmaterials.2.090601
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发表时间：
2018
影响因子：
3.4
通讯作者：
Liao Meiyong
中科院分区：
文献类型：
--
作者：
Wu Haihua;Sang Liwen;Li Yumeng;Teraji Tokuyuki;Li Tiefu;Imura Masataka;You Jianqiang;Koide Yasuo;Toda Masaya;Liao Meiyong
减少缺陷引起的能量耗散对于实现量子平台和高灵敏度微机电（MEMS）和纳米机电系统（NEMS）传感器应用的超高品质因数机械谐振器至关重要。单晶金刚石（SCD）因其出色的机械性能和固有的低能量耗散而成为高品质因数机械谐振器的理想材料。为了实现具有极端性能和高可靠性的机械谐振器，需要开发全SCD机械谐振器。通过使用智能切割方法和原子层蚀刻去除谐振器内的缺陷，我们实现了室温下超过百万的超高品质因数的SCD-on-SCD机械谐振器。其品质因数比基于多晶金刚石、单晶硅和其他晶体材料的最先进的 MEMS 悬臂梁高一个或多个数量级。金刚石 MEMS 谐振器对于传感器应用以及与金刚石量子中心耦合的方案非常有前景。
The reduction of the energy dissipation induced by defects is essential to achieve the ultrahigh-quality-factor mechanical resonators for the applications of quantum platform and high-sensitivity microelectromechanical (MEMS) and nanoelectromechanical system (NEMS) sensors. Single-crystal diamond (SCD) is the ideal material for high-quality-factor mechanical resonators due to its outstanding mechanical properties and intrinsic low-energy dissipation. To achieve mechanical resonators with extreme properties as well as high reliability, it is desirable to develop all-SCD mechanical resonators. By using a smart-cut method and atomic layer etching to remove the defects within the resonators, we achieve the SCD-on-SCD mechanical resonators with ultrahigh quality factors of over one million at room temperature. The quality factors are one or more orders of magnitude higher than those of the state-of-the-art MEMS cantilevers based on polycrystalline diamond, single-crystal silicon, and other crystal materials. The diamond MEMS resonators would be highly promising for sensor application as well as for the scheme for coupling with quantum centers in diamond.
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DOI：
--
发表时间：
1992
期刊：
影响因子：
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作者：
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影响因子：
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作者：
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作者：
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通讯作者：
Koide, Yasuo
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作者：
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Fantner, Georg E.