Understanding of PS-b-PMMA phase segregation under laser-induced millisecond thermal annealing
Understanding of PS-b-PMMA phase segregation under laser-induced millisecond thermal annealing
复制标题
了解激光诱导毫秒热退火下的 PS-b-PMMA 相偏析
DOI:
10.1117/12.2086057
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发表时间:
2015
期刊:
影响因子:
--
通讯作者:
Thompson
中科院分区:
文献类型:
--
作者:
Jacobs;Liedel;Thompson
Laser thermal annealing of PS-b-PMMA is shown to modify phase segregation within the milliseconds timeframe at temperatures from the glass transition to far above the order-disorder transition temperature. We report the kinetics of phase segregation of cylinder forming PS-b-PMMA (53.8 kg/mol, fPS= 0.7) as probed by micro-beam grazing incidence small angle X-ray scattering. Structure evolution was probed as a function of peak temperature, time at temperature, and quench rate, with phase segregation readily occurring on millisecond time scales and at peak quench rates up to 107K/s. The final film morphology is dependent on both the anneal time and the quench rate to ambient. With heating to sufficiently high temperatures, the thermal history is erased yielding a final state is purely dependent on the quench rate.
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影响因子:
3.5
作者:
Ferrarese Lupi, F.;Giammaria, T. J.;Perego, M.
通讯作者:
Perego, M.
DOI:
--
发表时间:
2007
期刊:
2007 IEEE International Electron Devices Meeting
影响因子:
--
作者:
T. Yamamoto;T. Kubo;T. Sukegawa;E. Takii;Y. Shimamune;N. Tamura;T. Sakoda;M. Nakamura;H. Ohta;T. Miyashita;H. Kurata;S. Satoh;M. Kase;T. Sugii
通讯作者:
T. Sugii
影响因子:
17.1
作者:
B. Jung;Jingquan Sha;F. Paredes;M. Chandhok;T. Younkin;U. Wiesner;C. Ober;M. Thompson
通讯作者:
M. Thompson
DOI:
--
发表时间:
2014
期刊:
Advanced Lithography
影响因子:
--
作者:
A. Jacobs;B. Jung;C. Ober;M. Thompson
通讯作者:
M. Thompson