Aerosol Jet Printing of SU-8 as a Passivation Layer Against Ionic Solutions.
Aerosol Jet Printing of SU-8 as a Passivation Layer Against Ionic Solutions.
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DOI：
10.1007/s11664-021-09396-4
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发表时间：
2022-04
影响因子：
2.1
通讯作者：
Franklin, Aaron D.
中科院分区：
文献类型：
--
作者：
Ye, Shulin;Williams, Nicholas X.;Franklin, Aaron D.
为了确保与离子溶液直接接触的低成本电子产品（如电子生物传感器）的稳定性，电极经常被钝化以防止导致腐蚀的电流泄漏。基于环氧树脂的聚合物SU-8产生了对离子溶液钝化的有利性能。然而，它几乎普遍通过洁净室技术进行图案化，这增加了器件成本和制造复杂性。印刷电子元件已被证明是降低制造成本的可行方法。关于SU-8印刷的先前报告集中于所得的印刷结构，很少强调其随后用作钝化层。在这里，我们展示了使用超声波雾化的气溶胶喷射打印机的SU-8的打印。我们表明，SU-8可以印刷没有重新制定，印刷SU-8是一个可行的钝化层导电银线，在离子溶液中测试时。将印刷的SU-8膜延伸超出下面的导电电极100 μm，产生了六个数量级的漏电流降低，并在20次电压扫描中产生了高稳定性。最后，我们将印刷后固化时间优化为160°C下的15分钟，这进一步降低了漏电流。虽然低成本的电子生物传感设备的发展越来越多地转向印刷方法，但印刷钝化策略的缺乏阻碍了这一转变。在这项研究中取得的进展，对气溶胶喷射可印刷SU-8钝化层提供了有益的进展，对一个完全印刷，稳定的电子生物传感设备。
To ensure stability for low-cost electronics used in direct contact with ionic solutions (such as electronic biosensors), electrodes are frequently passivated to protect against current leakage, which leads to corrosion. The epoxy-based polymer SU-8 yields favorable properties for passivation against ionic solutions. However, it is nearly universally patterned via cleanroom techniques, which increases device cost and fabrication complexity. Printing electronic components has been shown to be a viable approach for decreasing fabrication cost. Previous reports on SU-8 printing focus on the resultant printed structure, with little emphasis on its subsequent use as a passivation layer. Here, we demonstrate the printing of SU-8 with an aerosol jet printer using ultrasonic aerosolization. We show that SU-8 can be printed without reformulation, and that printed SU-8 is a viable passivation layer over conductive silver lines, when tested in ionic solutions. Extending the printed SU-8 film beyond the underlying conductive electrodes by 100 μm produced a six order of magnitude decrease in leakage current and resulted high stability over 20 voltage sweeps. Finally, we optimized post-printing cure time to 15 minutes at 160°C, which further minimized leakage current. While the development of low-cost, electronic biosensing devices has increasingly moved towards printing methods, the lack of a printed passivation strategy has hindered this transition. The advancements made in this study towards an aerosol jet printable SU-8 passivation layer provide useful progress towards a fully printed, stable electronic biosensing device.
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