Cu Patterning Using Femtosecond Laser Reductive Sintering of CuO Nanoparticles under Inert Gas Injection.

Cu Patterning Using Femtosecond Laser Reductive Sintering of CuO Nanoparticles under Inert Gas Injection.
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DOI:
10.3390/ma14123285
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发表时间:
2021-06-14
期刊:
Materials (Basel, Switzerland)
影响因子:
--
通讯作者:
Yoshidomi K
Yoshidomi K
中科院分区:
其他
文献类型:
--
作者:
Mizoshiri M;Yoshidomi K

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本文报道了惰性气体注入对飞秒激光还原烧结CuO纳米颗粒(NPs)产生的Cu图案的影响。飞秒激光还原烧结在金属和金属氧化物复合材料中的应用一直受到限制。利用飞秒激光脉冲在惰性气体注入下辐照cuo纳米颗粒浆料,旨在减少形成的图案中金属氧化物的产生。在实验评价中,在N2和Ar气体注入下,CuO和Cu2O等铜氧化物对应的x射线衍射峰要比在空气注入下小得多。增大两种气体的注入速度均能提高CuO纳米粒子x射线衍射峰的还原程度,但过高的注入速度(≥100 mL/min)会显著降低图案的表面密度。这些结果与烧结/熔化面积比定性一致。在惰性气体注入下的飞秒激光还原烧结实现了金属图案的无真空直写。
In this paper, we report the effect of inert gas injection on Cu patterning generated by femtosecond laser reductive sintering of CuO nanoparticles (NPs). Femtosecond laser reductive sintering for metal patterning has been restricted to metal and metal-oxide composite materials. By irradiating CuO-nanoparticle paste with femtosecond laser pulses under inert gas injection, we intended to reduce the generation of metal oxides in the formed patterns. In an experimental evaluation, the X-ray diffraction peaks corresponding to copper oxides, such as CuO and Cu2O, were much smaller under N2 and Ar gas injections than under air injection. Increasing the injection rates of both gases increased the reduction degree of the X-ray diffraction peaks of the CuO NPs, but excessively high injection rates (≥100 mL/min) significantly decreased the surface density of the patterns. These results qualitatively agreed with the ratio of sintered/melted area. The femtosecond laser reductive sintering under inert gas injection achieved a vacuum-free direct writing of metal patterns.
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