Preseeded Optical Scatterers as a Template for Enhancing Order in Inorganic Phototropic Growth

Preseeded Optical Scatterers as a Template for Enhancing Order in Inorganic Phototropic Growth
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预种光学散射体作为增强无机向光性生长秩序的模板

DOI:
10.1021/acs.jpcc.1c02746
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发表时间:
2021
期刊:
The Journal of Physical Chemistry C
影响因子:
--
通讯作者:
Lewis, Nathan S.
Lewis, Nathan S.
中科院分区:
--
文献类型:
--
作者:
Simonoff, Ethan;Thompson, Jonathan R.;Meier, Madeline C.;Kennedy, Kathleen M.;Hamann, Kathryn R.;Lewis, Nathan S.

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光刻图案化的衬底被用作光学散射体的模板,这些散射体为Se-Te的无机光敏生长播下了种子。傅里叶谱分析表明,与在名义上无特征的衬底上生长的薄膜相比,在有图案光学散射体的衬底上生长的薄膜表现出更好的Se-Te图案保真度和更窄的薄膜图案空间周期分布。全波电磁模型和蒙特卡罗模拟表明,Se-Te薄膜在具有图案光学散射体的衬底上生长与实验观察到的图案吻合良好。另外进行了模拟以研究模式周期约束的限制。模拟表明,沉积在模板基板上的薄膜可以表现出低至~ 80%和高达~ 160%的模式周期,这是沉积在非模板基板上的薄膜所观察到的模式周期。
Lithographically patterned substrates were used as templates of optical scatterers that seeded the inorganic phototropic growth of Se–Te. Relative to films grown on nominally featureless substrates, films grown on substrates having patterned optical scatterers demonstrated much improved Se–Te pattern fidelities and a narrower distribution of film pattern spatial periods, as quantified by Fourier spectrum analysis. Full-wave electromagnetic modeling and Monte Carlo simulations of Se–Te film growth on substrates with patterned optical scatterers were in good agreement with the patterns observed experimentally. Additional simulations were performed to investigate the limits to pattern period confinement. Simulations revealed that films deposited onto templated substrates can exhibit pattern periods as low as ∼80% and as high as ∼160% of the pattern period observed for films deposited on nontemplated substrates.
基底对光电沉积 Se-Te 纳米结构长程有序的影响。
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