An electromagnetically excited silicon nitride beam resonant accelerometer.
An electromagnetically excited silicon nitride beam resonant accelerometer.
复制标题
电磁激励氮化硅梁谐振加速度计
DOI：
10.3390/s90301330
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发表时间：
2009
期刊：
影响因子：
--
通讯作者：
Wang J
中科院分区：
文献类型：
--
作者：
Chen D;Wu Z;Liu L;Shi X;Wang J
提出了一种基于MEMS体硅技术的新型高度对称结构的谐振微梁加速度计，并给出了该方案的一些数值模拟结果。加速度计由两个检测质量、四个支撑铰链、两个锚点和两端夹在两个检测质量上的振动三梁组成。选择LPCVD富硅氮化物作为谐振三束材料，并对三束结构进行了参数优化。三重梁由位于梁上表面的薄膜电极进行电磁激发和感应。仿真和实验结果表明，新颖的结构提高了谐振加速度计的比例因子，并改善了其他性能问题，例如不敏感输入加速度的横轴灵敏度等。
A resonant microbeam accelerometer of a novel highly symmetric structure based on MEMS bulk-silicon technology is proposed and some numerical modeling results for this scheme are presented. The accelerometer consists of two proof masses, four supporting hinges, two anchors, and a vibrating triple beam, which is clamped at both ends to the two proof masses. LPCVD silicon rich nitride is chosen as the resonant triple beam material, and parameter optimization of the triple-beam structure has been performed. The triple beam is excited and sensed electromagnetically by film electrodes located on the upper surface of the beam. Both simulation and experimental results show that the novel structure increases the scale factor of the resonant accelerometer, and ameliorates other performance issues such as cross axis sensitivity of insensitive input acceleration, etc.
影响因子：
4.6
作者：
BURRER, C;ESTEVE, J
通讯作者：
ESTEVE, J
影响因子：
2.7
作者：
Seshia, AA;Palaniapan, M;Montague, S
通讯作者：
Montague, S
影响因子：
4.6
作者：
Ferrari, V;Ghisla, A;Taroni, A
通讯作者：
Taroni, A