Bias voltage dependence of superlubricity lifetime of hydrogenated amorphous carbon films in high vacuum
Bias voltage dependence of superlubricity lifetime of hydrogenated amorphous carbon films in high vacuum
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高真空中氢化非晶碳薄膜超润滑寿命的偏压依赖性
DOI：
10.1016/j.triboint.2017.08.020
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发表时间：
2018
影响因子：
6.2
通讯作者：
Xianrong Wang
中科院分区：
文献类型：
--
作者：
Longchen Cui;Hui Zhou;Kaifeng Zhang;Zhibin Lu;Xianrong Wang
在不同偏置电压下，用磁控溅射法在Ar+C2H2混合气体中沉积了氢化非晶碳(a-C：H)薄膜。A-C：H薄膜的力学性能、拉曼光谱和高真空摩擦行为表明，在偏压为0、-50和−100V时沉积的薄膜为类聚合物碳膜，在−为150V时沉积的薄膜为类金刚石碳膜。随着偏压的增加，薄膜在高真空下的超润滑性寿命从10000次增加到28000次，摩擦系数∼为0.002。类金刚石薄膜的耐磨寿命为∼600次。PLC薄膜耐磨性的提高归功于PLC网络交联度的提高和薄膜致密性的提高。
We deposit hydrogenated amorphous carbon (a-C:H) films by magnetron sputtering of graphite in an Ar + C2H2 mixture at various bias voltages. The mechanical properties, Raman spectra, and high-vacuum frictional behaviors of the a-C:H films indicate that the films deposited at bias 0, –50, and −100 V are polymer-like carbon (PLC) films and the film deposited at −150 V is a diamond-like carbon (DLC) film. The lifetimes of superlubricity, with friction coefficient ∼0.002, of the PLC films in high-vacuum increase from 10000 to 28000 cycles with increasing bias, although the film thicknesses decrease. The DLC film's wear-life is ∼600 cycles. The enhanced wear-resistance in PLC films is attributed to improvement of the crosslinking degree of the PLC network and the film compactness.
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影响因子：
3.5
作者：
D. Thiry;Aurore De Vreese;F. Renaux;J. Colaux;S. Lucas;Y. Guinet;L. Paccou;E. Bousser;R. Snyders
通讯作者：
D. Thiry;Aurore De Vreese;F. Renaux;J. Colaux;S. Lucas;Y. Guinet;L. Paccou;E. Bousser;R. Snyders
磁控溅射技术制备 a-C:H 薄膜：衬底偏压的影响
影响因子：
6.7
作者：
Ye Yinping;Ji Li;Zhou Huidi;Wang Yongxia;Chen Jianmin;Li Hongxuan
通讯作者：
Li Hongxuan
影响因子：
2.9
作者：
Leloup, G;Holvoet, PE;Devaux, J
通讯作者：
Devaux, J
影响因子：
4.1
作者：
F. Piazza;S. Schulze;G. Relihan;A. Golański
通讯作者：
F. Piazza;S. Schulze;G. Relihan;A. Golański
影响因子：
2.1
作者：
Kok, YN;Hovsepian, PE;Petrov, I
通讯作者：
Petrov, I