Effect of texture on wear resistance of tantalum nitride film
Effect of texture on wear resistance of tantalum nitride film
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织构对氮化钽薄膜耐磨性的影响
DOI：
10.1016/j.triboint.2019.01.001
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发表时间：
2019-05
影响因子：
6.2
通讯作者：
Zhou Lingping
中科院分区：
文献类型：
--
作者：
Tan Pin;Fu Licai;Teng Jie;Zhu Jiajun;Yang Wulin;Li Deyi;Zhou Lingping
通过反应性磁控溅射沉积技术在WC-CO底物上制造δ-TAN膜。可以通过调节溅射功率和工作气压来改变颗粒的离子能量和迁移率来调整δ-TAN膜的质地。在高工作气压和较低的功率下，由于较大的离子运动电阻和低驱动力而形成（111）纹理的薄膜上观察到的不足结构。通过降压增加离子迁移率会导致表面能最低的完全致密δ-TAN（200）膜。刮擦测试用于测量膜与底物的键强度以及膜如何失败。 δ-TAN的耐磨性与质地具有很强的相关性。具有最低磨损速率（2.4×10-6mm3/n·m）的δ-TAN膜远低于WC-CO（4.0×10-6mm3/n·M）和δ-TAN膜的磨损速率（2.4×10-6mm3/n·m）和（111）纹理（4.3×10-6mm3/n·m）。具有（200）纹理或没有明显纹理的δ-TAN膜的硬度高于30GPA，远高于（111）纹理。此外，（200）纹理的最低表面能诱导δ-TAN膜和AISI52100钢对应物之间的轻度粘附。因此，（200）纹理的δ-TAN膜在这些薄膜中具有最佳的耐磨性。已经发现，对δ-TAN膜的可加工性行为的进一步研究导致与WC-CO底物相比，钢球的磨损体积损失更大。这部电影尤其是（200）质地可以作为切割工具的绝佳候选者。
The δ-TaN films were fabricated through reactive magnetron sputtering deposition technique onto WC-Co substrate. The texture of δ-TaN films can be tuned by adjusting the sputtering power and working gas pressure to vary the ion energy and mobility of particles. The underdense structure observed on film with (111) texture was formed at high work gas pressure and lower power due to large ion motion resistance and low driving force, respectively. Increasing ion mobility by decreasing pressure would lead to a fully dense δ-TaN (200) film with the lowest surface energy. The scratch test was used to measure the bond strength of the film to the substrate and how the film fails. The wear resistance of δ-TaN presented a strong correlation with texture. δ-TaN film with (200) texture possessed of lowest wear rate (2.4 × 10−6mm3/N·m) far below that of WC-Co (4.0 × 10−6mm3/N·m) and δ-TaN film with (111) texture (4.3 × 10−6mm3/N·m). δ-TaN film with (200) texture or no obvious texture had a hardness above 30 GPa, which was much higher than that of (111) texture. In addition, the lowest surface energy of (200) texture induced the mild adhesion between δ-TaN film and AISI52100 steel counterpart. So δ-TaN film with (200) texture had the best wear resistance among these films. Further study on the machinability behavior of δ-TaN films has been found to lead to more remarkable loss of wear volume of steel ball comparing with the WC-Co substrate. This film especially with (200) texture can be expected as an excellent candidate for cutting tools.
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DOI：
10.1016/0168-583x(95)00980-9
发表时间：
1996-02
影响因子：
1.3
作者：
Wei Wang-;Tao Wang;Xin Wang
通讯作者：
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影响因子：
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作者：
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通讯作者：
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影响因子：
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作者：
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DOI：
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发表时间：
2013
期刊：
Physics Procedia
影响因子：
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作者：
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通讯作者：
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影响因子：
10.9
作者：
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