Investigation on the compensation effect of residual carbon impurities in low temperature grown Mg doped GaN films
Investigation on the compensation effect of residual carbon impurities in low temperature grown Mg doped GaN films
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低温生长掺镁GaN薄膜中残留碳杂质的补偿效应研究
DOI:
10.1063/1.4873957
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发表时间:
2014-04
影响因子:
3.2
通讯作者:
Yang, H.
中科院分区:
文献类型:
--
作者:
Zhang, S. M.;Wang, H.;Zhu, J. J.;Yang, H.
The influence of unintentionally doped carbon impurities on electrical resistivity and yellow luminescence (YL) of low-temperature (LT) grown Mg doped GaN films is investigated. It is found that the resistivity of Mg doped GaN films are closely related to the residual carbon impurity concentration, which may be attributed to the compensation effect of carbon impurities. The carbon impurity may preferentially form deep donor complex CN-ON resulting from its relatively low formation energy. This complex is an effective compensate center for MgGa acceptors as well as inducing YL in photoluminescence spectra. Thus, the low resistivity LT grown p-type GaN films can be obtained only when the residual carbon impurity concentration is sufficiently low, which can explain why LT P-GaN films with lower resistivity were obtained more easily when relatively higher pressure, temperature, or NH3/TMGa flow rate ratio were used in the LT grown Mg doped GaN films reported in earlier reports.
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