Analysis of corrective characteristics of various polishing methods for mid-frequency errors

Analysis of corrective characteristics of various polishing methods for mid-frequency errors
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各种抛光方法对中频误差的校正特性分析

DOI:
10.1177/0954406213486601
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发表时间:
2014-02
期刊:
Proc IMechE Part C:J Mechanical Engineering Science
影响因子:
--
通讯作者:
CJ Wang
CJ Wang
中科院分区:
其他
文献类型:
--
作者:
R Pan;ZZ Wang;YB Guo;CJ Wang

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从理论上分析了3种抛光方法对中频误差的修正特性,旨在验证数控光学表面成形和数控主动研磨在加工过程中被气囊抛光替代的可能性。首先计算了三种抛光工艺的去除函数,并利用快速傅里叶变换求出了各种抛光工艺的频谱。根据频谱图,得到了截止频率与空间频率误差工作范围的关系曲线。结果表明,空间频率的影响范围由抛光方法、抛光工具直径大小和去除函数形状决定。另外,计算机控制主动研抛只能修正低频误差,不能修正或产生中频误差,计算机控制光学表面成形可以修正部分中频误差和低频误差,但同时也会产生一些新的中频误差;对于帽状抛光,它可以是在平滑中的计算机控制的主动式研磨,其仅修改和产生低频误差,或者是在局部抛光中的计算机控制的光学表面加工,其校正和产生中频误差。另外,气囊抛光的效率高于其他两种方法。结果表明,从中频修正能力或抛光效率的角度来看,气囊抛光可以取代计算机控制主动研磨和计算机控制光学表面成形,用一个工具完成两个抛光阶段,这对扩大气囊抛光在光学制造中的应用具有重要意义。
The theoretical analysis of corrective characteristics of three kinds of polishing methods for mid-frequency errors was studied, which was aimed to confirm the possibility that computer control optical surfacing and computer control active-lap can be replaced by bonnet polishing in the machining process. The first step was to calculate the removal functions of three kinds of polishing technologies and use fast Fourier transform to figure out the frequency spectrum of each method. After that, according to the frequency spectra, curves of cut-off frequencies related to the working ranges of spatial frequencies errors were obtained. It revealed that the affected scope of spatial frequencies is determined by the polishing method, diameter size of polishing tool and shape of removal function. Moreover, only low-frequency errors could be modified and mid-frequency errors could not be corrected or created by computer control active-lap, and computer control optical surfacing can correct part of the mid-frequency errors and low-frequency errors in the polishing process, but at the same time can produce some new mid-frequency errors; as for bonnet polishing, it can be computer control active-lap-like in smoothing which only modified and created the low-frequency errors or computer control optical surfacing-like which corrected and created the mid-frequency errors in local polishing. Otherwise, the efficiency of bonnet polishing is higher than the other two methods. As a result, seen from the point of correction ability of mid-frequency or polishing efficiency, bonnet polishing could replace computer control active-lap and computer control optical surfacing for finishing two polishing stages by only one tool, which is significant to extending the application of bonnet polishing in optical manufacturing.
DOI: --
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影响因子: 3.8
作者:
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