Design and simulation of a high power CMOS driver for microactuators

Design and simulation of a high power CMOS driver for microactuators
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微执行器高功率 CMOS 驱动器的设计与仿真

DOI:
10.1016/j.proeng.2011.12.317
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发表时间:
2011
期刊:
Procedia Engineering
影响因子:
--
通讯作者:
Aggour K
Aggour K
中科院分区:
--
文献类型:
--
作者:
Aggour K

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将微致动器应用于实际应用的挑战之一是将其与单片驱动电路集成。基于AMIS 0.7μm工艺,设计并仿真了一种大功率、高电压的CMOS微执行器驱动电路。在电路设计中,采用了一个8级Dickson电荷泵,从5V电源产生36 V的电压。仿真结果表明,该电路在2kΩ的外负载下,输出电压为17.5V,脉冲宽度为17.5V,输出功率为150 mW,适用于电阻在1 k Ω ~ 5 k Ω之间的微压电驱动器的驱动。
One of the challenges for implementing microactuators into practical applications is to integrate them with monolithic driving circuits. In this paper, a large output power, high voltage CMOS circuit for driving micro electrothermal actuators has been designed and simulated based on the AMIS 0.7μm technology. In the circuit design, an 8-stage Dickson charge pump is used for producing 36V from 5V supply. Simulated results show that the circuit is capable of outputting 17.5V and 150mW for a 2kΩ external load and a pulse with 17.5V height, which is applicable for the driver of micro electrothermal actuators, since the resistance of many micro electrothermal actuators ranges from 1kΩ to 5kΩ.
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