Low voltage, high speed and small area in-plane MEMS switch
Low voltage, high speed and small area in-plane MEMS switch
复制标题
低电压、高速、小面积面内MEMS开关
DOI：
10.1088/1361-6439/ab1635
复制
发表时间：
2019-05
影响因子：
2.3
通讯作者：
尤政
中科院分区：
文献类型：
--
作者：
边潍;赵嘉昊;尤政
静电共面微机电系统（MEMS）继电器/开关因其低功耗、工艺简单而得到广泛应用。然而，与平面外设计相比，平面内设计通常遭受高吸合电压，因为体硅工艺的特征尺寸限制了驱动电极之间的差距。为了提高驱动力和降低吸合电压，通常必须牺牲面积成本和速度。平衡吸合电压、速度和面积成本对于MEMS继电器/开关是困难的，但在许多实际应用中是必不可少的。梳状结构有望缓解这一矛盾。本文将梳状结构与悬臂梁结构相结合。结果表明，吸合电压随着器件的质量和面积的减小而减小。介绍了一种新型的静电横向MEMS开关。实验表明，12 V的吸合电压，120秒的开关时间与28 V的驱动电压在大气压下，和小面积使用传统的体硅工艺制造。
Electrostatic in-plane microelectromechanical systems (MEMS) relays/switches are widely applied for their low power consumption and simple process. However, compared to the out-of-plane designs, in-plane designs usually suffer from high pull-in voltage, since the feature size of the bulk-silicon process limits the gap between the driving electrodes. Area cost and speed usually have to be sacrificed to enhance the driving force and decrease the pull-in voltage. Balancing the pull-in voltage, speed and area cost is difficult for MEMS relays/switches but is essential in many practical applications. Comb structure is promising to relieve this contradiction. In this paper, we integrated the comb structure with the cantilever structure. As a result, the pull-in voltage decreased with the decreasing of the mass and area cost. A novel electrostatic lateral MEMS switch was introduced. The experiments have shown that 12 V pull-in voltage, 120 s switching time with a 28 V driving voltage at atmospheric pressure, and small area were fabricated using a conventional bulk-silicon process.
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DOI：
10.1109/memsys.2011.5734540
发表时间：
2011-03
期刊：
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems
影响因子：
--
作者：
F. M. Ozkeskin;S. Choi;K. Sarabandi;Y. Gianchandani
通讯作者：
F. M. Ozkeskin;S. Choi;K. Sarabandi;Y. Gianchandani
影响因子：
4.6
作者：
Schimkat, J
通讯作者：
Schimkat, J
DOI：
10.1088/0960-1317/23/10/103001
发表时间：
2013-09
影响因子：
2.3
作者：
Benjamin F Toler;R. Coutu;J. McBride
通讯作者：
Benjamin F Toler;R. Coutu;J. McBride
DOI：
10.1109/sensor.2005.1496636
发表时间：
2005-06
期刊：
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
影响因子：
--
作者：
Il-Joo Cho;Taeksang Song;Sang-Hyun Baek;E. Yoon
通讯作者：
Il-Joo Cho;Taeksang Song;Sang-Hyun Baek;E. Yoon
DOI：
10.1088/0022-3727/48/24/245503
发表时间：
2015-05
期刊：
Journal of Physics D: Applied Physics
影响因子：
--
作者：
Farid Tajaddodianfar;H. N. Pishkenari;M. Yazdi;E. M. Miandoab
通讯作者：
Farid Tajaddodianfar;H. N. Pishkenari;M. Yazdi;E. M. Miandoab