Phase resolved optical emission spectroscopy of coaxial microplasma jet operated with He and Ar
Phase resolved optical emission spectroscopy of coaxial microplasma jet operated with He and Ar
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氦气和氩气同轴微等离子体射流的相分辨发射光谱
DOI：
10.1140/epjd/e2010-00246-9
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发表时间：
2010
期刊：
影响因子：
--
通讯作者：
V. Schulz-von der Gathen
中科院分区：
文献类型：
--
作者：
J. Benedikt;S. Hofmann;N. Knake;H. Böttner;R. Reuter;A. von Keudell;V. Schulz-von der Gathen
大气压等离子体射流源由于其在医学工业（如活体组织的处理）、表面改性、材料刻蚀或合成等方面的应用前景，目前已成为众多研究者关注的焦点。本文研究了以空心毛细管为内电极、陶瓷管为外电极的同轴微等离子体射流的激发机理。该微等离子体射流在He和Ar气体中操作，并通过电学测量、光学发射光谱以及空间和相位分辨波长集成光学光谱对其进行了研究。在He中操作的平行金属电极的微尺度大气压等离子体射流的测量也被示出用于比较。以He为等离子体形成气体，可区分出四种不同的模式.在低电压下观察到的电极间环形空间中的α放电与平行电极射流中的放电非常相似。随着电压的增加，出现γ放电，首先局限于毛细管的尖端。随着电压的进一步升高，环形空间中也出现γ放电。空心阴极等离子体被观察到在任何电压上使用的对称轴的射流。只有一种模式的等离子体操作中观察到的氩气具有明显不同的行为。我们假设，它是一个单一的微放电的附加介质阻挡放电。
Atmospheric pressure plasma jet sources are currently in the focus of many researchers for their promising applications in medical industry (e.g. treatment of living tissues), surface modification or material etching or synthesis. Here we report on the study of excitation mechanisms of a coaxial microplasma jet with a hollow capillary as an inner electrode and a ceramic tube with metal ring as outer electrode. This microplasma jet is operated in He and Ar gas and it is investigated by means of electrical measurements, optical emission spectroscopy and space and phase resolved wavelength integrated optical spectroscopy. Measurements of a microscale atmospheric pressure plasma jet with parallel metal electrodes operated in He are shown for comparison as well. Four different modes are distinguished with He as plasma forming gas. Theαdischarge in annular space between the electrodes, observed at low applied voltages, is very similar to the discharge in the jet with parallel electrodes. As the voltage increases aγdischarge appears, first localized at the tip of the capillary. As the voltage increases further theγdischarge appears in the annular space as well. A hollow cathode plasma is observed at any voltage used on the symmetry axis of the jet. Only one mode of plasma operation is observed in argon gas with distinctively different behavior. We hypothesize that it is comparable to a single microdischarge of a filamentary dielectric barrier discharge.
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影响因子：
2.2
作者：
J. Schäfer;R. Foest;A. Ohl;K. Weltmann
通讯作者：
J. Schäfer;R. Foest;A. Ohl;K. Weltmann
微腔等离子体器件和阵列的最新进展：多功能光子平台
DOI：
10.1088/0022-3727/38/11/002
发表时间：
2005
期刊：
Journal of Physics D: Applied Physics
影响因子：
--
作者：
J. G. Eden;S. Park;N. Ostrom;K. Chen
通讯作者：
K. Chen
影响因子：
3.2
作者：
T. Ichiki;Ryo Taura;Y. Horiike
通讯作者：
T. Ichiki;Ryo Taura;Y. Horiike
通过 UHF 感应耦合微等离子体 CVD 制造球形碳
DOI：
--
发表时间：
2003
期刊：
J. Phys. D : Appl. Phys. 36
影响因子：
--
作者：
Oroguchi;T.;C. Y. Li;K. Ishii;Y. Shimizu
通讯作者：
Y. Shimizu
射频驱动大气压等离子体射流的动力学
影响因子：
4
作者：
L. Schaper;S. Reuter;J. Waskoenig;K. Niemi;V. D. Gathen;T. Gans
通讯作者：
T. Gans