Investigation of the nanoscale features fabricated on the HOPG surface induced by STM electric lithography under different voltage regions in ambient conditions
Investigation of the nanoscale features fabricated on the HOPG surface induced by STM electric lithography under different voltage regions in ambient conditions
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研究环境条件下不同电压区域下 STM 电光刻在 HOPG 表面上制造的纳米级特征
DOI：
10.1016/j.precisioneng.2012.12.004
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发表时间：
2013-04
期刊：
影响因子：
--
通讯作者：
Wansheng Zhao
中科院分区：
文献类型：
--
作者：
Ye Yang;Wansheng Zhao
碳基材料在纳米技术领域引起了越来越多的关注，其制备和应用也受到了人们的高度重视。本文采用STM直接光刻技术在高压脉冲下对高取向热解石墨（HOPG）表面进行了纳米加工。在不同的电压幅值下获得了不同的特性的制造功能。特别地，我们观察到在高于5V左右的HOPG表面上的石墨薄片的剥离和折叠的现象。对反馈、样品台驱动、电流值等工艺参数进行了详细的研究。此外，隧道结的分段电流密度由J. G.西蒙斯方程提出了局部阳极氧化和介电间隙电击穿引起的纳米爆炸损伤的可能机制来解释制备结果。
Carbon-based materials have attracted more and more interests in the nanotechnology and high attention has been paid to their fabrication and application. In this work, the nanofabrication of the highly oriented pyrolytic graphite (HOPG) surface was carried out by means of STM direct lithography under voltage pulse. Distinct characteristics of the fabricated features were obtained under different voltage magnitudes. Specifically, we observed the phenomena of exfoliation and folding of the graphite flakes on the HOPG surface above 5V or so. Detailed study of the process parameters, such as the feedback, the driving of the sample platform, the current value was also performed. Moreover, the segmented current density of the tunnel junction was calculated from J.G. Simmons's equations. Local anodic oxidation and nano explosive damage caused by the electrical breakdown of dielectric gap were put forward as the possible mechanisms to explain the fabricated results.
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影响因子：
15
作者：
So, HM;Won, K;Lee, JO
通讯作者：
Lee, JO
影响因子：
3.2
作者：
SIMMONS, JG
通讯作者：
SIMMONS, JG
DOI：
10.1007/1-4020-8006-9_3
发表时间：
2013
期刊：
--
影响因子：
--
作者：
J. Jia;Wei-sheng Yang;Q. Xue
通讯作者：
J. Jia;Wei-sheng Yang;Q. Xue
DOI：
10.1115/1.4001718
发表时间：
2010-06
影响因子：
4
作者：
K. Virwani;A. Malshe;K. Rajurkar
通讯作者：
K. Virwani;A. Malshe;K. Rajurkar
DOI：
10.1007/978-94-011-1812-5
发表时间：
1993-11
期刊：
--
影响因子：
--
作者：
J. Stroscio;W. Kaiser
通讯作者：
J. Stroscio;W. Kaiser