Investigation on AFM-based micro/nano-CNC machining system
Investigation on AFM-based micro/nano-CNC machining system
复制标题
基于AFM的微纳米数控加工系统研究
DOI：
10.1016/j.ijmachtools.2007.01.008
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发表时间：
2007-09
影响因子：
14
通讯作者：
Liang, Yingchun
中科院分区：
文献类型：
--
作者：
Dong, Shen;Yan, Yongda;Sun, Tao;Liang, Yingchun
为解决原子力显微镜（AFM）纳米加工过程中存在的非线性和大尺寸AFM扫描仪重复定位精度低等问题，提出了一种类似于传统数控机床的新型微纳米加工系统。该系统集成了原子力显微镜与精密工作台。采用AFM光杠杆检测方法，在样品表面施加很轻的法向载荷。利用AFM金刚石针尖作为切割工具来刮擦样品。精密载物台用作移动样品的夹具。这个过程和用刨床加工不同。在此基础上，讨论了刀尖几何形状、划痕方向、法向载荷、加工速度和进给量对加工深度的影响。提出了基于该系统的二维和三维复杂微纳结构的AFM机械刻划制备技术。制造了复杂的规则结构。基于该系统还进行了AFM针尖诱导局部阳极氧化实验，结果表明，该系统在较大加工尺寸下具有较高的重复定位精度，具有较强的加工能力。
To solve the problems in the atomic force microscope (AFM)-based nanomachining process such as nonlinearity and low repeatability positioning accuracy of AFM scanner in a larger scale, a novel micro/nanomachining system similar to conventional CNC machine tools was presented. The system integrated AFM with a precision stage. AFM optical lever detection method was employed to apply a very light normal load on the sample surface. An AFM diamond tip was utilized as a cutting tool to scratch the sample. The precision stage was used as a worktable to move the sample. This process was different from machining with a planer. Based on the system, effects of tip geometry, the scratching direction, the normal load, the machining velocity and the feed on the machining depth were discussed. Fabricating techniques of two-dimensional and three-dimensional complex micro/nano-structures using AFM-based mechanical scratching method based on this system were presented. Complex regular structures were fabricated. Moreover, AFM-tip-induced local anodic oxidation was also carried out based on this system, which displayed higher repeatability positioning accuracy with a larger machining dimensions and a significant machining ability of this system.
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DOI：
10.4028/www.scientific.net/kem.259-260.577
发表时间：
2003-12
期刊：
Key Engineering Materials
影响因子：
--
作者：
T. Sun;Yongda Yan;J. Xia;S. Dong;Yingchun Liang;K. Cheng
通讯作者：
T. Sun;Yongda Yan;J. Xia;S. Dong;Yingchun Liang;K. Cheng
影响因子：
56.9
作者：
Piner, RD;Zhu, J;Mirkin, CA
通讯作者：
Mirkin, CA
影响因子：
3.5
作者：
Notargiacomo, A;Foglietti, V;Nicolini, C
通讯作者：
Nicolini, C
影响因子：
5
作者：
Zhaoguo Jiang;Chung-Jen Lu;D. Bogy;T. Miyamoto
通讯作者：
Zhaoguo Jiang;Chung-Jen Lu;D. Bogy;T. Miyamoto
DOI：
10.1201/9781482274004
发表时间：
2002-03
期刊：
--
影响因子：
--
作者：
M. Madou
通讯作者：
M. Madou