Removable polytetrafluoroethylene template based epitaxy of ferroelectric copolymer thin films
Removable polytetrafluoroethylene template based epitaxy of ferroelectric copolymer thin films
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基于可移除聚四氟乙烯模板的铁电共聚物薄膜外延
DOI：
10.1016/j.apsusc.2017.12.126
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发表时间：
2018-04
影响因子：
6.7
通讯作者：
Guodong ZHU
中科院分区：
文献类型：
--
作者：
Wei Xia;Qian Cheng;Yunlong Jiang;Guodong ZHU
近年来，铁电聚合物在有机电子和柔性电子领域显示出巨大的潜力。为满足新型电子器件和系统对高性能、低能耗的要求，铁电聚合物薄膜的结构和电学性能有待进一步优化。一种可能的方法是通过可移动的高阶聚四氟乙烯（PTFE）模板实现铁电薄膜的外延生长。本文通过对铁电共聚物薄膜的结构和电学测量，系统地研究了外延工艺中的两个关键参数——退火温度和施加压力，并对其进行了优化。实验结果表明，通过适当组合这两个参数可以实现可控外延生长。退火温度要求高于铁电共聚物薄膜的熔点，同时施加适度的压力（这里为2.0 MPa左右）。压力过低（1.0 MPa左右）通常会导致外延工艺失效，而压力过高（3.0 MPa左右）通常会导致铁电薄膜上PTFE模板残留。
In recent years ferroelectric polymers have shown their great potentials in organic and flexible electronics. To meet the requirements of high-performance and low energy consumption of novel electronic devices and systems, structural and electrical properties of ferroelectric polymer thin films are expected to be further optimized. One possible way is to realize epitaxial growth of ferroelectric thin films via removable high-ordered polytetrafluoroethylene (PTFE) templates. Here two key parameters in epitaxy process, annealing temperature and applied pressure, are systematically studied and thus optimized through structural and electrical measurements of ferroelectric copolymer thin films. Experimental results indicate that controlled epitaxial growth is realized via suitable combination of both parameters. Annealing temperature above the melting point of ferroelectric copolymer films is required, and simultaneously moderate pressure (around 2.0 MPa here) should be applied. Over-low pressure (around 1.0 MPa here) usually results in the failure of epitaxy process, while over-high pressure (around 3.0 MPa here) often results in residual of PTFE templates on ferroelectric thin films.
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