Nanofabrication of insulated scanning probes for electromechanical imaging in liquid solutions.
Nanofabrication of insulated scanning probes for electromechanical imaging in liquid solutions.
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DOI：
10.1088/0957-4484/21/36/365302
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发表时间：
2010-09-10
期刊：
影响因子：
3.5
通讯作者：
Rack PD
中科院分区：
文献类型：
--
作者：
Noh JH;Nikiforov M;Kalinin SV;Vertegel AA;Rack PD
在本文中，绝缘扫描探针的制造和电气和机电特性已被证明在液体溶液中。硅微电极依次涂有铬和二氧化硅，并且使用具有XeF2的聚焦电子束诱导蚀刻（FEBIE）在尖端顶点处选择性地蚀刻二氧化硅。铬层不仅充当从尖端的导电路径，而且充当抗蚀刻层。这种绝缘的扫描探针制造工艺与任何商业AFM针尖兼容，并且可以用于容易地定制扫描探针针尖特性，因为FEBIE不需要光刻。所制造的探头的适用性证明了标准的地形校准网格以及压电响应力显微镜（PFM）和电气测量在周围和液体环境中的成像。
In this paper, the fabrication and electrical and electromechanical characterization of insulated scanning probes have been demonstrated in liquid solutions. The silicon cantilevers were sequentially coated with chromium and silicon dioxide, and the silicon dioxide was selectively etched at tip apex using focused electron beam induced etching (FEBIE) with XeF2 The chromium layer acted not only as the conductive path from the tip, but also as an etch resistant layer. This insulated scanning probe fabrication process is compatible with any commercial AFM tip and can be used to easily tailor the scanning probe tip properties because FEBIE does not require lithography. The suitability of the fabricated probes is demonstrated by imaging of standard topographical calibration grid as well as piezoresponse force microscopy (PFM) and electrical measurements in ambient and liquid environments.
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