Study of dark current random telegraph signal in proton-irradiated backside illuminated CMOS image sensors

Study of dark current random telegraph signal in proton-irradiated backside illuminated CMOS image sensors
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质子辐照背照式 CMOS 图像传感器中暗电流随机电报信号的研究

DOI:
10.1016/j.rinp.2020.103443
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发表时间:
2020-12
期刊:
影响因子:
5.3
通讯作者:
Qi Guo
Qi Guo
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Bingkai Liu;Yudong Li;Lin Wen;Dong Zhou;Jie Feng;Xiang Zhang;Yulong Cai;Jing Fu;Jiawei Chen;Qi Guo

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研究了四管钉扎光电二极管0.18-μm背照式CMOS图像传感器中的暗电流随机电报信号。传感器分别用50、60和70 MeV的高能质子辐照。分析了质子辐照后RTS像素数、RTS能级数和跃迁最大幅度的辐射变化。用两种理论模型研究了质子能量对RTS发生几率的影响。此外,还讨论了DC-RTS对传感器外延层厚度的依赖关系,表明不同外延层的DC-RTS现象没有显著差异。
The dark current random telegraph signal (DC-RTS) has been investigated in a four-transistor pinned photodiode 0.18-μm backside illuminated CMOS image sensor (BSI CIS). The sensors were irradiated by high energy protons of 50, 60 and 70 MeV, respectively. After exposure to protons, the radiation-induced variations of the number of RTS pixels, the number of RTS levels and transition maximum amplitude are analyzed. The effect of proton energy on RTS occurrence probability is studied using two types of theoretical models. Furthermore, DC-RTS dependence on the epitaxial layer thickness of the sensors is discussed, showing that there is no significant difference for DC-RTS phenomenon in different epitaxial layers.
DOI: 10.1109/tns.2009.2014759
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