Investigation of the mechanical properties of aluminium oxide thin films on polymer substrates by a combination of fragmentation and scratch testing
Investigation of the mechanical properties of aluminium oxide thin films on polymer substrates by a combination of fragmentation and scratch testing
复制标题
通过碎裂和划痕测试相结合的方式研究聚合物基底上的氧化铝薄膜的机械性能
DOI：
10.1016/j.surfcoat.2012.01.040
复制
发表时间：
2012
影响因子：
5.4
通讯作者：
Moghal J
中科院分区：
文献类型：
--
作者：
Moghal J
本文报道了聚合物膜上的AlOx涂层的两种机械测试的组合，这种测试可用于气体阻挡层：单轴断裂测试和纳米划痕测试。通过AFM在沿着划痕测试的不同点处表征的所得膜的形态非常能提供涂层失效的性质的信息，并且结合氧化物的FTIR研究可以解释在定量机械测试中观察到的差异。作为这些方法区分具有相同标称化学性质的相同基材上的涂层之间的差异的能力的说明，对聚萘二甲酸乙二醇酯（PEN）上的三种AlOx涂层进行比较。不同的薄膜在可比的条件下产生的直流（DC）磁控溅射，射频（RF）磁控溅射和高功率脉冲磁控溅射（HiPIMS）。在涂层之间测量到明显的差异。DC膜显示出最大的失效应变，这可能是由于FTIR表明的更开放的结构，而HiPIMS样品显示出不太均匀但更好粘附的涂层。
This paper reports the combination of two mechanical tests on AlOx coatings on polymer film, of the kind that can be used for gas barrier layers: uniaxial fragmentation tests and nano-scratch tests. The resulting morphology of the film, as characterised by AFM at different points along the scratch test, is very informative of the nature of the coating failure, and combined with FTIR studies of the oxides can explain the observed differences in the quantitative mechanical tests. As an illustration of the capability of these methods to distinguish differences between coatings on the same substrate with the same nominal chemistry, a comparison between three AlOx coatings on polyethylene naphthalate (PEN) is made. The different films were produced in comparable conditions by direct current (DC) magnetron sputtering, radio frequency (RF) magnetron sputtering and high power impulse magnetron sputtering (HiPIMS). Clear differences were measured between the coatings. The DC film showed the greatest strain-to-failure, perhaps due to a more open structure indicated by FTIR, and the HiPIMS sample showed a less homogeneous, but better adhered, coating.
影响因子：
3.2
作者：
A. Ehiasarian;A. Vetushka;A. Hecimovic;S. Konstantinidis
通讯作者：
A. Ehiasarian;A. Vetushka;A. Hecimovic;S. Konstantinidis
氧化铝薄膜的远程等离子体增强金属有机化学气相沉积
DOI：
--
发表时间：
2008
期刊：
影响因子：
--
作者：
I. Volintiru;M. Creatore;J. L. Hemmen;M. Sanden
通讯作者：
M. Sanden
通过反应磁控溅射在聚碳酸酯基底上沉积的氧化铝薄膜的表征
DOI：
--
发表时间：
1999
期刊：
影响因子：
--
作者：
K. Koski;J. Hölsä;P. Juliet;Z. Wang;R. Aimo;K. Pischow
通讯作者：
K. Pischow