Influences of fringing capacitance on threshold voltage and subthreshold swing of a GeOI metal-oxide-semiconductor field-effect transistor

Influences of fringing capacitance on threshold voltage and subthreshold swing of a GeOI metal-oxide-semiconductor field-effect transistor
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边缘电容对GeOI金属氧化物半导体场效应晶体管阈值电压和亚阈值摆幅的影响

DOI:
10.1088/1674-1056/24/3/037303
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发表时间:
2015-03
期刊:
影响因子:
1.7
通讯作者:
Huang Yong
Huang Yong
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Xu Jing-Ping;Liu Lu;Bai Yu-Rong;Huang Yong

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Models of threshold voltage and subthreshold swing, including the fringing-capacitance effects between the gate electrode and the surface of the source/drain region, are proposed. The validity of the proposed models is confirmed by the good agreement between the simulated results and the experimental data. Based on the models, some factors impacting the threshold voltage and subthreshold swing of a GeOI metal-oxide-semiconductor field-effect transistor (MOSFET) are discussed in detail and it is found that there is an optimum thickness of gate oxide for definite dielectric constant of gate oxide to obtain the minimum subthreshold swing. As a result, it is shown that the fringing-capacitance effect of a short-channel GeOI MOSFET cannot be ignored in calculating the threshold voltage and subthreshold swing.
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