Study on the high-temperature triggering and holding characteristics of PDSOI SCR devices

Study on the high-temperature triggering and holding characteristics of PDSOI SCR devices
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PDSOI SCR器件高温触发和保持特性研究

DOI:
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发表时间:
2021-10
影响因子:
1.6
通讯作者:
Chuanbin Zeng
Chuanbin Zeng
中科院分区:
工程技术4区
文献类型:
--
作者:
Jiaxin Wang;Xiaojing Li;Chuanbin Zeng

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本文研究了静电放电(ESD)保护器件在25 ~ 300 ℃温度范围内的触发和保持特性。所测量的ESD.protection器件是采用0.18 μm部分耗尽硅绝缘体(PDSOI)技术制造的可控硅整流器(SCR)器件。使用传输线脉冲(TLP)测试进行测量。SCR器件的触发电压VT_1和保持电压VH随温度的升高呈现负系数现象。详细分析了触发条件与保持条件的异同。通过计算机辅助设计(TCAD)技术模拟,提供了温度对VT 1和VH影响的基本物理机制。
In this paper, the triggering and holding characteristics of electrostatic discharge (ESD) protection devices.operating under various ambient temperatures ranging from 25 ◦C to 300 ◦C are investigated. The measured ESD.protection devices were silicon-controlled rectifier (SCR) devices fabricated in 0.18-μm partially depleted siliconon-.insulator (PDSOI) technology. Measurements were conducted using the transmission line pulse (TLP) test.system. The triggering voltage, VT1, and the holding voltage, VH, of the SCR devices show negative coefficient.phenomenon with the increasing temperature. The similarities and differences between the triggering condition.and the holding condition are analyzed in detail. The underlying physical mechanisms related to the effects of.temperature on the VT1 and VH are provided by the assist of technology computer-aided design (TCAD).simulation.
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