Optically rough and physically flat TCO substrate formed by coating ZnO thin film on pyramid-patterned glass substrate

Optically rough and physically flat TCO substrate formed by coating ZnO thin film on pyramid-patterned glass substrate
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在金字塔图案玻璃基板上涂覆 ZnO 薄膜形成光学粗糙且物理平坦的 TCO 基板

DOI:
10.1016/j.solmat.2018.11.043
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发表时间:
2019-03
影响因子:
6.9
通讯作者:
Yang T
Yang T
中科院分区:
材料科学2区
文献类型:
--
作者:
Meng L;Chai HY;Yang XG;Lv ZR;Yang T

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为了在不影响光敏层生长的情况下提高薄膜硅太阳能电池的光吸收,在玻璃衬底上旋涂Al掺杂ZnO薄膜,制备了一种光学粗糙、物理平坦(OR-PF)TCO衬底。该基片表面平整,均方根粗糙度为10.9nm,可见光透过率大于86%,方块电阻为29.5 Ω/sq,光散射能力适中。利用室温纳米压印技术复制ZnO薄膜的金字塔形表面纹理,在玻璃衬底上形成了具有随机金字塔形貌的表面形貌。作为氢化非晶硅单结太阳能电池的前电极,该OR-PF基板相对于AZO涂覆的平板玻璃基板实现了0.91 eV的Voc、0.71的FF、约8%的Jsc增益和约20%的效率增益。的Jsc增益归因于在a-Si:H太阳电池的光吸收的增强所触发的界面金字塔形态的衍射行为,而大的VocandFF的实现归因于在光活性层的生长质量的改善。基于双向散射分布函数的计算结果,该衬底使得对于600-700 nm波长的光的衍射峰的强度相当,但是相对于常规的织构化ZnO衬底远离镜面方向散射较少的光。这种OR-PF衬底将能够同时实现高效的光子管理和高质量光活性材料的生长,用于薄膜硅太阳能电池。
An optically rough and physically flat (OR-PF) TCO substrate was developed by spin-coating Al-doped ZnO thin film on glass substrate patterned with random pyramidal morphology to enhance the light absorption in superstrate-type thin-film silicon solar cells without deteriorating the growth of photoactive layers. This substrate possesses flat surface with a root mean square roughness of 10.9 nm, high visible light transmittance of over 86%, a sheet resistance of 29.5 Ω/sq, and moderate light-scattering ability. A surface morphology of random pyramidal morphology was formed on the glass substrate by replicating the pyramidal surface texture of a ZnO thin film with the room-temperature nanoimprint technique. Employed as the front electrode of hydrogenated amorphous Si single-junction solar cells, this OR-PF substrate enabled aVocof 0.91 eV, anFFof 0.71, aJscgain of approximately 8%, and an efficiency gain of approximately 20% with respect to the AZO-coated flat glass substrate. TheJscgain is attributed to the enhancement in the light absorption of a-Si:H solar cells triggered by the diffraction behaviour of the interfacial pyramidal morphology, while the achievement of largeVocandFFis ascribed to the improvement in the growth quality of the photoactive layers. Based on the calculation results of the bidirectional scattering distribution function, this substrate empowers comparable intensity of the diffraction peaks for 600–700 nm wavelength light but scatters less light away from the specular direction with respect to the conventional pyramid-textured ZnO substrate. This OR-PF substrate would enable efficient photon management and the growth of high-quality photoactive materials simultaneously for thin-film silicon solar cells.
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