Fabrication of curved microlens array using a drop-on-demand droplet generator and polydimethylsiloxane replica mold
Fabrication of curved microlens array using a drop-on-demand droplet generator and polydimethylsiloxane replica mold
复制标题
使用按需滴滴发生器和聚二甲基硅氧烷复制模具制造弯曲微透镜阵列
DOI：
10.1117/1.oe.53.11.117109
复制
发表时间：
2014-11
影响因子：
1.3
通讯作者：
Weiyi Zhang
中科院分区：
文献类型：
--
作者：
Hejuan Chen;Li Zhu;Hongcheng Wang;Weiyi Zhang
抽象的。介绍了一种使用按需滴(DOD)液滴发生器和聚二甲基硅氧烷(PDMS)复制模具制作曲面微透镜阵列(MLA)的简单方法。利用一种简单、经济的DOD液滴发生器制作了平面微透镜阵列(平面MLA)，然后通过多次复制工艺制备了曲面MLA。从平面MLA复制的PDMS弹性体膜模用于将微透镜从平面衬底转移到球面上。NORLAND65(NOA65)光学胶粘剂因其良好的光学性能而被选为弯曲MLA的材料。制作了球面曲率半径约为5.1 mm和1.8 mm的曲面MLA。通过对PDMS弹性体膜模进行表面处理，避免了复制过程中的形态损伤，并分析了弯曲微透镜的变形量，变形量在2.1%~8.5%之间。用白光干涉仪和原子力显微镜对曲面微透镜的表面质量进行了测量，结果表明，扫描面积为2×2-μm2的曲面微透镜表面的算术平均偏差Ra为0.54 nm，表面光滑度良好。通过投影实验测量了曲面MLA的成像性能和聚焦性能。实验结果表明，曲面MLA在尺度不变处理、机器人视觉和快速运动检测等方面具有很高的应用潜力。
Abstract. A simple approach was demonstrated to fabricate the curved microlens array (MLA) using a drop-on-demand (DOD) droplet generator and a polydimethylsiloxane (PDMS) replica mold. The planar microlens array (planar MLA) was fabricated using a simple and cost-effective DOD droplet generator, and then the curved MLA was fabricated by multiple replication processes. The PDMS elastomer membrane mold replicated from the planar MLA was used to transfer the microlenses from a planar substrate onto a spherical surface. The NORLAND65 (NOA65) optical adhesive was chosen to be the material of the curved MLA due to its good optical properties. The curved MLA, whose radii of curvature of the spherical surface were approximately 5.1 and 1.8 mm, was fabricated. The morphology damage during the replication process was avoided by the surface treatment of the PDMS elastomer membrane mold and the deformation of the curved microlens was analyzed and was ranged from 2.1% to 8.5%. The surface quality of the curved microlenses was measured by a white light interferometer and an atomic force microscope and the results showed that the arithmetical mean deviation of the profile Ra was 0.54 nm with a 2×2-μm2 scanned area, while the resultant surface showed an excellent surface smoothness. The imaging and focus performance of the curved MLA were measured by a projection experiment. The experimental results demonstrated a high potential for curved MLA being applied to scale-invariant processing, robot vision, and fast motion detection.
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DOI：
10.3788/ope.20142202.0360
发表时间：
2014
期刊：
Optics and Precision Engineering
影响因子：
--
作者：
朱晓阳 Zhu Xiao-yang;侯丽雅 Hou Li-ya;郑. Z. Yue;王洪成 Wang Hong-cheng;章维一 Zhang Wei-yi
通讯作者：
朱晓阳 Zhu Xiao-yang;侯丽雅 Hou Li-ya;郑. Z. Yue;王洪成 Wang Hong-cheng;章维一 Zhang Wei-yi
影响因子：
3.1
作者：
Feng Li;Sihai Chen;Huanping Luo;Yiqing Gao
通讯作者：
Feng Li;Sihai Chen;Huanping Luo;Yiqing Gao
使用按需滴滴发生器在疏水表面制造多尺度微透镜阵列
影响因子：
5
作者：
Li Zhu;Hejuan Chen;Mei Yang;Weiyi Zhang
通讯作者：
Weiyi Zhang
DOI：
10.1109/memsys.2002.984323
发表时间：
2002-08
期刊：
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)
影响因子：
--
作者：
Sung-Keun Lee;Kwang-Cheol Lee;S.S. Lee
通讯作者：
Sung-Keun Lee;Kwang-Cheol Lee;S.S. Lee
影响因子：
6.1
作者：
Zhang, Mengying;Wu, Jinbo;Wen, Weijia
通讯作者：
Wen, Weijia