Engineering Research Equipment Grant: Auger Electron Spectroscopy System for Microelectronics and Material Surface Research

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An Auger Electron Spectroscopy (AES) system is being acquired for the Alabama Microelectronics Science and Technology Center (AMSTC) and the Auburn University Materials Research Laboratory (AUMRL). It will be used under the guidance of specialists in Auger spectroscopy for the characterization of a variety of materials prepared at AMSTC and AUMRL in support of the following ongoing or proposed research areas: plasma assisted low temperature epitaxial growth of semiconductor crystals, plasma polymerization controlled dry etching techniques for VLSI fabrication, novel approaches for control of fiber-epoxy interfaces in composite materials, plasma copolymer dielectric layers for microelectronics applications, study of pitting corrosion mechanisms by surface modification (ion implantation), and surface degradation of magnetic recording material Co-Cr alloy films.