Engineering Research Equipment Grant: Auger Electron Spectroscopy System for Microelectronics and Material Surface Research

工程研究设备补助金：用于微电子和材料表面研究的俄歇电子能谱系统

• 批准号: 8506546
• 负责人: Yonhua Tzeng
• 金额: $ 9万
• 依托单位: Auburn University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1985
• 资助国家: 美国
• 起止时间: 1985-09-01 至 1986-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8506546&HistoricalAwards=false
• 关键词: Engineering; Research; Equipment; Grant; Auger

An Auger Electron Spectroscopy (AES) system is being acquired for the Alabama Microelectronics Science and Technology Center (AMSTC) and the Auburn University Materials Research Laboratory (AUMRL). It will be used under the guidance of specialists in Auger spectroscopy for the characterization of a variety of materials prepared at AMSTC and AUMRL in support of the following ongoing or proposed research areas: plasma assisted low temperature epitaxial growth of semiconductor crystals, plasma polymerization controlled dry etching techniques for VLSI fabrication, novel approaches for control of fiber-epoxy interfaces in composite materials, plasma copolymer dielectric layers for microelectronics applications, study of pitting corrosion mechanisms by surface modification (ion implantation), and surface degradation of magnetic recording material Co-Cr alloy films.

正在为该项目购置俄歇电子能谱仪（AES）系统。 亚拉巴马微电子科技中心（AMSTC）和 奥本大学材料研究实验室。 将 在俄歇光谱学专家的指导下使用， AMSTC和AUMRL制备的各种材料的表征 支持以下正在进行或拟议的研究领域： 半导体晶体的辅助低温外延生长， 用于超大规模集成电路的等离子体聚合控制干法刻蚀技术 纤维-环氧树脂界面控制的新方法， 复合材料、等离子体共聚物介电层 微电子学应用，点蚀机理的研究， 表面改性（离子注入）和表面降解 磁记录材料Co-Cr合金薄膜。