Engineering Research Equipment Grant: Laser Induced Chemistry, Deposition and Spectroscopy

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The goal of this research effort is to successfully deposit copper by a technique using a laser. The incentives to master this methodology relate to fabrication of micron and submicron features on chips for electronics applications. Other researchers are also expected to use the new system in their studies on vapor deposition, eutectic microstructures, and substrate system fabrication. The equipment to be used for the research project includes a detection system, rapid scan spectrometer and an interfacing computer system.