Engineering Research Equipment Grant: Laser Induced Chemistry, Deposition and Spectroscopy

这项研究的目标是通过激光技术成功地沉积铜。掌握这种方法的动机与电子应用芯片上微米和亚微米特征的制造有关。其他研究人员也希望在气相沉积、共晶微结构和衬底系统制造的研究中使用新系统。该研究项目将使用的设备包括检测系统、快速扫描光谱仪和接口计算机系统。

The goal of this research effort is to successfully deposit copper by a technique using a laser. The incentives to master this methodology relate to fabrication of micron and submicron features on chips for electronics applications. Other researchers are also expected to use the new system in their studies on vapor deposition, eutectic microstructures, and substrate system fabrication. The equipment to be used for the research project includes a detection system, rapid scan spectrometer and an interfacing computer system.