Microfabrication of Contoured Surfaces by Electroplating

本研究的目的是开发一种通用的制造技术，用于制造三维轮廓表面，该技术基于一种使用薄聚合物薄膜来精确控制局部电镀和电溶解速率的工艺。该过程提供了一种将任何二维光密度图转录成三维表面轮廓的通用方法。研究将包括实验和理论研究，旨在开发用于该过程的改进薄膜，计算机生成用于薄膜轮廓的光学掩模，通过电镀或电溶解通过薄膜形成轮廓的最终表面。并将方法扩展到化学镀和电溶（硅），超越了早期的电镀工作。

The objective of this research is to develop a generalized fabrication technique for manufacture of three-dimensional contoured surfaces based on a process which uses thin polymeric films to precisely control local rates of electoplating and electrodissolution. The process provides a generalized method of transcribing any two-dimensional optical density map into a three-dimensional surface contour. The research will include experimental and theoretical investigations aimed at development of improved films used in this process, computer generation of the optical masks used to contour the films which in turn form a contoured final surface by means of electroplating or electrodissolution through the film, and extension on the method to include electroless plating and electrodissolution (of silicon) going beyond earlier electroplating work.