Microfabrication of Contoured Surfaces by Electroplating

通过电镀对轮廓表面进行微加工

• 批准号: 8517474
• 负责人: John Angus
• 金额: $ 12.88万
• 依托单位: Case Western Reserve University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1986
• 资助国家: 美国
• 起止时间: 1986-05-15 至 1989-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8517474&HistoricalAwards=false
• 关键词: Microfabrication; Contoured; Surfaces; Electroplating

The objective of this research is to develop a generalized fabrication technique for manufacture of three-dimensional contoured surfaces based on a process which uses thin polymeric films to precisely control local rates of electoplating and electrodissolution. The process provides a generalized method of transcribing any two-dimensional optical density map into a three-dimensional surface contour. The research will include experimental and theoretical investigations aimed at development of improved films used in this process, computer generation of the optical masks used to contour the films which in turn form a contoured final surface by means of electroplating or electrodissolution through the film, and extension on the method to include electroless plating and electrodissolution (of silicon) going beyond earlier electroplating work.

本研究的目的是开发一种通用的制造 用于制造三维轮廓表面技术 在一个过程中，使用薄的聚合物膜，以精确地控制局部 电镀和电解溶解的速率。 所述方法提供 任意二维光密度的通用转录方法 映射成三维表面轮廓。 这项研究将 包括实验和理论研究， 在这一过程中使用的改进的电影的发展，计算机生成 用于使膜轮廓化的光学掩模中， 通过电镀的方法形成轮廓的最终表面，或 通过膜的电溶解，以及该方法的延伸， 包括无电镀覆和（硅）电溶解 超越了早期的电镀工作。