Chemical Imaging with the Stigmatic Ion Microscope

点击翻译按钮获取中文摘要

This project is in the general area of analytical and surface chemistry and in the subfield of secondary ion mass spectrometry (SIMS). This research program will investigate the factors affecting practical SIMS microanalysis of semiconductor and electronic devices and of biological tissues. The goals of this program are (1) to improve the spatial resolution of the stigmatic secondary ion microscope through the use of a charge-coupled device detector and (2) to provide high-resolution quantitative mapping of elemental and isotopic distributions in solids. The achievement of these goals will broaden the application of SIMS to many new important materials and biomedical problems.