Chemical Imaging with the Stigmatic Ion Microscope

该项目属于分析和表面化学的一般领域，以及二次离子质谱仪(SIMS)的子领域。这项研究计划将调查影响半导体和电子器件以及生物组织的实际SIMS微量分析的因素。该计划的目标是(1)通过使用电荷耦合器件探测器来提高柱面二次离子显微镜的空间分辨率；(2)提供固体中元素和同位素分布的高分辨率定量测绘。这些目标的实现将拓宽SIMS在许多新的重要材料和生物医学问题上的应用。

This project is in the general area of analytical and surface chemistry and in the subfield of secondary ion mass spectrometry (SIMS). This research program will investigate the factors affecting practical SIMS microanalysis of semiconductor and electronic devices and of biological tissues. The goals of this program are (1) to improve the spatial resolution of the stigmatic secondary ion microscope through the use of a charge-coupled device detector and (2) to provide high-resolution quantitative mapping of elemental and isotopic distributions in solids. The achievement of these goals will broaden the application of SIMS to many new important materials and biomedical problems.