Engineering Creativity Award: PLZT Thin Film Electro OPtic Materials for Light Modulation

铅，镧，锆酸盐和钛酸盐，在广泛的 组合物，联合收割机形成透明铁电陶瓷， 简称PLZT。光学透明度和电光 PLZT材料的特性使其可用于各种 电子设备，并优于竞争技术。 由于高成本，它们尚未在大规模商业化中使用。 开关所需的工作电压。 本研究采用的方法是使用PLZT靶， 溅射存款到透明衬底上，同时控制 基片温度、基片偏压、靶 成分和腔室压力。 通过改变这些因素， 最终的结果是具有一定厚度的透明铁电陶瓷， 内应力、形态和晶粒结构， 最终影响开关电压的阈值。 将得到的PLZT薄膜在以下方面具有应用 空间光调制器的电光器件、图象存储 器件反射显示器、滤波器和线性门阵列。

Lead, lanthanum, zirconate, and titanate, in a broad range of compositions, combine to form a transparent ferroelectric ceramic referred to as PLZT. the optical transparency and electrooptic properties of PLZT materials make them useful for a variety of electronic devices and advantageous over competing technologies. They have yet to be used on a large commercial scale due to high operating voltages required for switching. The approach taken in this research is to use a PLZT target to sputter deposit onto a transparent substrate while controlling the variables of substrate temperature, substrate bias, target composition, and chamber pressure. By varying these factors, the end result is a transparent ferroelectric ceramic with certain intrinsic stress, morphology, and grain structure which ultimately affect the threshold of the switching voltage. The PLZT thin films that will result have application in electrooptic devices for spatial light modulators, image storage devices reflective displays, filters, and linear gate arrays.