Microfabrication of The Scanning Tunneling Microscope

该奖项将支持针对以下方面的研究： 扫描隧道显微镜的研制 在一个硅芯片上。 这是《圣经》的宗旨。 研究表明，整个STM 可以通过微加工来构建， 与硅蚀刻相关的技术。 平面批量微制造工艺将是 用于生产集成STM扫描仪， 使用沉积在硅衬底上的尖端 图案化和蚀刻技术通常 用于制造集成电路。 该器械的尺寸为6 X 200 X 1000微米，它将包括一个薄膜 压电致动器，用于扫描所述尖端 样品表面。 如果成功，这项工作 会产生一种新的，非常便宜的课程 显微镜的研究， 原子尺度上的现象。 它也可以 导致了一种新的极其敏感的 加速度和力测量传感器。

This award will support research aimed at the development of a scanning tunneling microscope on a silicon chip. It is the purpose of the research to demonstrate that the entire STM can be constructed with the microfabrication technology associated with the etching of silicon. A planar batch-microfabrication process will be used to produce an integrated STM scanner and tip on a silicon substrate using deposition patterning and etching techniques commonly used in the manufacture of integrated circuits. The device will have dimensions of 6 X 200 X 1000 microns, and it will include a thin film piezoelectric actuator for scanning the tip over the sample surface. If successful, this work could lead to a new and very inexpensive class of microscopes for the study of many phenomena on an atomic scale. It could also lead to a new class of extremely sensitive sensors for acceleration and force measurement.