A Film Fabrication Facility for Undergraduate Laboratory and Research Project Courses
A Film Fabrication Facility for Undergraduate Laboratory and Research Project Courses
批准号:
8951627
负责人:
Tar-pin Chen
金额:
$3.79万
依托单位:
依托单位国家:
美国
项目类别:
Standard Grant
财政年份:
1989
资助国家:
美国
项目状态:
已结题
起止时间:
1989-07-15 至 1991-12-31
中文摘要
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英文摘要
Villanova will purchase a thin film fabrication facility consisting of three electron guns and a computer controlled shutter housed in an ultrahigh vacuum chamber. This facility will enable the Physics Department to offer students a chance to learn the art of thin film fabrication and application. The facility will be used in five laboratory courses and three research project-related courses. The presence of such a facility will provide the capability of making film samples, superlattices, quantum wells, semiconductor devices and tunneling junctions, as well as designing integrated circuits and electronic components needed for laboratory courses. This facility will upgrade these courses and allow students to learn applications of thin films, useful in research and in applications in industry. The university will provide funds equal to 106% of the award toward the operation of the project.
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