Advanced Thin Film Sputtering Fabrication Facility (TF-FAB)

先进薄膜溅射制造设备 (TF-FAB)

• 批准号: EP/X030202/1
• 负责人: Guillaume Zoppi
• 金额: $ 123.73万
• 依托单位: Northumbria University
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2023
• 资助国家: 英国
• 起止时间: 2023 至 无数据
• 项目状态: 未结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FX030202%2F1
• 关键词: Advanced; Thin; Film; Sputtering; Fabrication

Physical vapour deposition methods are recognised techniques to fabricate reproducible and durable coatings for industrial applications. The Advanced Thin Film Sputtering Fabrication Facility (TF-FAB) will provide a state-of-the-art facility for the fabrication of functional nano and micro-coatings for energy conversion and storage, sensing and biomedical devices. TF-FAB is a fully automated dual chamber magnetron sputtering system. Each chamber will include four magnetrons and associated power supplies, multiple gas lines, helium gas injection for localised doping, large substrate handling with heating and substrate plasma bias. In-situ ellipsometry will provide vital optical information of the growing films. TF-FAB will provide a platform to develop films with fewer impurities and defects, higher density, reduced thickness to increase the efficiency of solar cells or improved adhesion, hardness and biocompatibility to increase the lifetime of a total joint arthroplasty implants.TF-FAB will enable impact research in three distinctive areas: energy materials, biocompatible coatings and functional layers. This includes the following materials and applications:-Energy materials: Chalcogenides PV, hole and electron transport layers, Na- and Mg-based storage, Solid state electrolyte, electrodes-Biocompatible coatings: Ti-based super alloys, diamond like coatings, antimicrobial films-Functional layers: current sensing, metamaterials, transparent conductors, biosensors, wear resistantThe facility provides a platform for researchers to develop new inorganic thin films for energy materials, biocompatible and functional coatings. It supports unprecedented recent growth in thin film research at Northumbria University. TF-FAB is a game-changing facility for research areas that have been recognised internationally and have delivered impact at successive REF exercises. TF-FAB provides a transformational capacity increase in thin film fabrication and will create new collaborative opportunities between academia and industry for the rapid screening of new materials offering a unique breadth of materials range with high throughput and reproducibility.TF-FAB will directly support research which fits with the UK and regional 'clean growth' and 'ageing society' grand challenges. It aligns with the Engineering Research Infrastructure Roadmap under 'Materials fabrication' and also 'In-situ testing and characterisation' areas for further investment. These areas align with the Advanced Materials strategy from the Advanced Materials Leadership Council, in particular 'Materials for Health' and 'Materials for Energy'. TF-FAB will support research in energy materials, and electrical and bio-functional coatings which align with EPSRC prosperity outcomes such as 'healthy' and 'resilient' nation as well as several of the UK Innovation Strategy technologies including 'Advanced Materials and Manufacturing', 'Energy and Environment Technologies'. The system will be used to produce metal and transparent conductive oxides and dielectrics for photovoltaics, electrode materials for fuel cells and batteries, super alloys, electrical sensing and biocompatible films encompassing strategic priorities such as 'engineering net zero', 'transforming health' and frontiers in 'engineering, manufacturing and technology' and associated themes.

物理气相沉积方法是公认的制造工业应用的可再生和耐用涂层的技术。先进的薄膜溅射制造设施（TF-FAB）将为制造用于能量转换和存储，传感和生物医学设备的功能纳米和微米涂层提供最先进的设施。TF-FAB是一种全自动双室磁控溅射系统。每个腔室将包括四个磁控管和相关的电源，多个气体管线，氦气注入局部掺杂，大型基板处理加热和基板等离子体偏压。原位椭偏测量将为薄膜的生长提供重要的光学信息。TF-FAB将提供一个平台，开发杂质和缺陷更少，密度更高，厚度更薄的薄膜，以提高太阳能电池的效率，或改善粘附力，硬度和生物相容性，以增加全关节置换植入物的寿命。TF-FAB将在三个独特的领域进行影响研究：能源材料，生物相容性涂层和功能层。这包括以下材料和应用：-能源材料：硫族化合物PV、空穴和电子传输层、钠基和镁基存储、固态电解质、电极-生物相容性涂层：钛基超合金、类金刚石涂层、抗菌膜-功能层：电流传感，超材料，透明导体，生物传感器，该设施为研究人员提供了一个平台，用于开发新的能源材料，生物相容性和功能涂层的无机薄膜。它支持了诺森比亚大学薄膜研究的前所未有的近期增长。TF-FAB是一个改变游戏规则的研究领域的设施，已在国际上得到认可，并在连续的REF演习中产生了影响。TF-FAB为薄膜制造提供了转型性的产能增长，并将为学术界和工业界创造新的合作机会，以快速筛选新材料，提供独特的材料范围，具有高通量和可重复性。TF-FAB将直接支持适合英国和地区“清洁增长”和“老龄化社会”重大挑战的研究。它与“材料制造”下的工程研究基础设施路线图以及“原位测试和表征”领域保持一致，以进一步投资。这些领域符合先进材料领导理事会的先进材料战略，特别是“健康材料”和“能源材料”。TF-FAB将支持能源材料、电气和生物功能涂层的研究，这些研究与EPSRC的繁荣成果（如“健康”和“弹性”国家）以及英国创新战略技术（包括“先进材料和制造”、“能源和环境技术”）保持一致。该系统将用于生产金属和透明导电氧化物和光敏材料，用于燃料电池和电池的电极材料，超级合金，电气传感和生物相容性薄膜，包括战略优先事项，如“工程净零”，“改变健康”和“工程，制造和技术”的前沿以及相关主题。