IC-Processed Diaphragm Transducers

本研究旨在开发一种用于IC的技术- 加工的压电膜片换能器; 特别是麦克风、扬声器和IR 传感器. 的表征和建模 麦克风将被执行，并优化 将寻求业绩。 各种设计和 将制造麦克风的结构， 表征了 用于分析、模拟、 压电振膜的优化将 开发以辅助设计过程，并 支持通用微机电结构 建造在横隔板、桥梁或悬臂上， 复合层。 建议的红外传感器将使用 ZnO的热释电效应是坐在一个 非常薄和大的隔膜（几微米厚 和几平方毫米）。

This research seeks to develop a technology for IC- processed, piezoelectric, diaphragm transducers; particularly a microphone, a speaker, and an IR sensor. Characterization and modelling of the microphone will be performed, and optimum performance will be sought. Various designs and structures of the microphone will be fabricated and characterized. CAD tools for analysis, simulation, and optimization of the piezoelectric diaphragm will be developed to aid the design process, and to support generic microelectromechanical structures built on a diaphragm, a bridge or a cantilever with composite layers. The proposed IR sensor will use the pyroelectric effect of ZnO that is sitting on a very thin and large diaphragm (a few microns thick and a few millimeters square).