Contactless RF MEMS Switches

非接触式 RF MEMS 开关

• 批准号: 0601723
• 负责人: Eun Kim
• 金额: $ 24万
• 依托单位: University of Southern California
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-05-01 至 2009-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0601723&HistoricalAwards=false
• 关键词: Contactless; RF; MEMS; Switches

0601723KimThe objective of this research is to advance the fundamental science and technology for a contactless switch with a power isolation ratio of greater than 100:1 for microwave signals of 5 Watt power level. This switch is capable of hot switching and also is very reliable in hot switching, due to its non-contact mode, which eliminates all material challenges associated with metal-to-metal and metal-to-dielectric contacts. This contactless approach is brand new for microwave switches, and requires significant advancement in the fundamental science and technology for piezoelectric actuation of two-edges clamped bridges. The approach is to use a novel combination of variable capacitors and fixed on-chip inductors, so that a power isolation ratio of 100:1 can be obtained with a capacitance variation of mere 10:1. The high power handling capability is achieved by a clever design of placing one deformable bridge in the middle of two stationary electrodes with air gaps between them, in order to balance the electrostatic forces stemming from the high microwave power passing through the switch.Intellectual merit: This research will improve the reliability and power-handling capability of microwave switches for channel selection in a wireless transceiver and beam forming/steering through phased antenna array. The potential applications to commercial wireless communication and military tracking/guidance systems are numerous. Broader Impact: As wireless communication becomes ubiquitous, the impact of the proposed switch on society will be immense. The proposed research will also advance the fundamental science and technology that has broad applicability to microwave microsystems, structural engineering and piezoelectric actuation of microstructures, etc. The PI plans to create a web page that presents valuable knowledge and hands-on insight on RF MEMS switches, piezoelectrically actuated bridges, residual stress control, etc. The educational impacts of the web disseminations will great due to (1) the PIs commitment to make it fruitful for the readers and (2) the unusual opportunities for the readers to obtain valuable, hands-on-knowledge on RF MEMS, and increasingly important field in the ever growing wireless communications.

本研究的目的是为研制功率隔离比大于100：1、功率等级为5瓦的微波信号的非接触式开关提供基础科学和技术支持。由于其非接触模式，该开关能够进行热切换，并且在热切换中非常可靠，从而消除了与金属对金属和金属对介质接触相关的所有物质挑战。这种非接触式方法对于微波开关来说是一种全新的方法，需要在基础科学和技术方面取得重大进展，以实现两边固定桥的压电式驱动。该方法利用可变电容和片上固定电感的新颖组合，在电容变化仅为10：1的情况下获得100：1的功率隔离比。通过巧妙地在两个具有气隙的固定电极中间放置一个可变形电桥，以平衡通过开关的高微波功率产生的静电力，从而实现高功率处理能力。智力优势：本研究将提高微波开关的可靠性和功率处理能力，用于无线收发信机的信道选择和相控阵天线的波束形成/引导。在商业无线通信和军事跟踪/制导系统中的潜在应用是众多的。更广泛的影响：随着无线通信变得无处不在，拟议中的转变对社会的影响将是巨大的。拟议的研究还将促进具有广泛适用性的基础科学和技术，如微波微系统、结构工程和微结构的压电驱动等。PI计划创建一个网页，提供关于RF MEMS开关、压电桥、残余应力控制等的宝贵知识和实践见解。由于(1)PI承诺使其为读者带来丰硕成果，以及(2)读者获得宝贵的、实践的RF MEMS知识，以及在不断增长的无线通信领域日益重要的领域，网络传播将产生巨大的教育影响。