SaTC: STARSS: Small: Wireless, Battery-less, Monolithic Tamper Detector for Semiconductor Chip Authenticity

这项研究探索了一种亚毫米大小的、无电池的篡改检测芯片的可行性，该芯片可以通过液滴喷射器放置在半导体封装内，并且可以从半导体封装的外部无线询问，以检测任何记录的篡改活动。这项研究为个性化检测和记录篡改活动的范式转换概念奠定了基础，以确保半导体芯片的真实性。此外，基于液滴喷射器的封装技术也为半导体芯片开辟了一种全新的封装方法。因此，这项研究对包括半导体行业在内的许多行业都产生了巨大的影响。研究的目的是研究一种单芯片检测器的可行性，该检测器(1)可以记录任何侵入半导体芯片封装的篡改行为而不需要电池，(2)可以通过无喷嘴液滴喷射器放置在半导体芯片封装内，(3)可以无线询问而不需要打开半导体封装。当压电薄膜支承在自由端具有验证质量的非压电悬臂梁上时，(1)当存在因去封装或去层而产生的振动能量时，以及(2)当由于去焊接或去层而产生热时，产生电压。电压(由去封装或去层引起的振动引起)分解用于在硅衬底上构建的被动表面声波(SAW)谐振器的另一压电膜，在SAW谐振器上留下永久标记，而SAW谐振器不再作为谐振器工作，从而永久地记录篡改活动。声表面波谐振器采用无线射频信号进行解调。

This research explores the feasibility of a submillimeter-sized, battery-less, tamper detecting chip that can be placed inside a semiconductor package through a droplet ejector, and which can be interrogated wirelessly from the outside of the semiconductor package for detecting any recorded tampering activity. The research paves foundational technology for a paradigm-shifting concept of individualized detection and recording of tampering activities to ensure authenticity of semiconductor chips. Also, the packaging technology based on a droplet ejector opens up a brand-new packaging approach for semiconductor chips. Thus, the research greatly impacts many industries including semiconductor industry.The research is to study the feasibility of a single-chip detector that (1) can record any invasive semiconductor-chip-package tampering activity without need of a battery, (2) can be placed inside semiconductor chip packages through a nozzleless droplet ejector, and (3) can be wirelessly interrogated without need to open up the semiconductor package. With a piezoelectric film supported on a non-piezoelectric cantilever with a proof mass at its free end, electrical voltage is generated (1) when there is vibrational energy due to de-packaging or de-layering and (2) when there is heat due to de-soldering or de-layering. The electrical voltage (induced by vibration due to de-packaging or de-layering) breaks down another piezoelectric film used for a passive Surface Acoustic Wave (SAW) resonator built on a silicon substrate, leaving a permanent mark on the SAW resonator, which no longer works as a resonator, thus permanently recording the tampering activity. The SAW resonator is interrogated wirelessly with radio frequency signal.