SaTC: STARSS: Small: Wireless, Battery-less, Monolithic Tamper Detector for Semiconductor Chip Authenticity

本研究探讨了一个亚毫米大小，无电池，篡改检测芯片，可以通过液滴喷射器放置在半导体封装内的可行性，并可以从半导体封装的外部进行无线询问，以检测任何记录的篡改活动。该研究为个性化检测和记录篡改活动的范式转变概念奠定了基础技术，以确保半导体芯片的真实性。同时，基于液滴喷射器的封装技术为半导体芯片的封装开辟了一条全新的途径。本研究的目的是研究一种单芯片检测器的可行性，该检测器（1）可以记录任何侵入性的半导体芯片封装篡改活动，而无需电池;（2）可以通过无障碍液滴喷射器放置在半导体芯片封装内;（3）可以无线询问，而无需打开半导体封装。利用支撑在非压电悬臂上的压电膜，在其自由端处具有检测质量块，（1）当存在由于去封装或去层而产生的振动能量时，以及（2）当存在由于去焊接或去层而产生的热量时，产生电压。电压（由由于拆包或分层引起的振动引起）击穿用于构建在硅衬底上的无源表面声波（SAW）谐振器的另一压电膜，在SAW谐振器上留下永久标记，其不再作为谐振器工作，从而永久记录篡改活动。SAW谐振器用射频信号无线询问。

This research explores the feasibility of a submillimeter-sized, battery-less, tamper detecting chip that can be placed inside a semiconductor package through a droplet ejector, and which can be interrogated wirelessly from the outside of the semiconductor package for detecting any recorded tampering activity. The research paves foundational technology for a paradigm-shifting concept of individualized detection and recording of tampering activities to ensure authenticity of semiconductor chips. Also, the packaging technology based on a droplet ejector opens up a brand-new packaging approach for semiconductor chips. Thus, the research greatly impacts many industries including semiconductor industry.The research is to study the feasibility of a single-chip detector that (1) can record any invasive semiconductor-chip-package tampering activity without need of a battery, (2) can be placed inside semiconductor chip packages through a nozzleless droplet ejector, and (3) can be wirelessly interrogated without need to open up the semiconductor package. With a piezoelectric film supported on a non-piezoelectric cantilever with a proof mass at its free end, electrical voltage is generated (1) when there is vibrational energy due to de-packaging or de-layering and (2) when there is heat due to de-soldering or de-layering. The electrical voltage (induced by vibration due to de-packaging or de-layering) breaks down another piezoelectric film used for a passive Surface Acoustic Wave (SAW) resonator built on a silicon substrate, leaving a permanent mark on the SAW resonator, which no longer works as a resonator, thus permanently recording the tampering activity. The SAW resonator is interrogated wirelessly with radio frequency signal.