SaTC: STARSS: Small: Wireless, Battery-less, Monolithic Tamper Detector for Semiconductor Chip Authenticity

这项研究探索了一种亚毫米大小、无电池、篡改检测芯片的可行性，这种芯片可以通过液滴喷射器放置在半导体封装内，并且可以从半导体封装外部无线询问，以检测任何记录的篡改活动。该研究为个性化检测和记录篡改活动的范式转换概念奠定了基础技术，以确保半导体芯片的真实性。此外，基于液滴喷射器的封装技术为半导体芯片的封装开辟了一条全新的途径。因此，该研究对包括半导体行业在内的许多行业产生了重大影响。这项研究是为了研究一种单芯片探测器的可行性，该探测器(1)可以记录任何侵入性半导体芯片封装的破坏活动，而不需要电池，(2)可以通过无喷嘴液滴喷射器放置在半导体芯片封装内，(3)可以在不打开半导体封装的情况下进行无线询问。将压电薄膜支承在自由端有证明质量的非压电悬臂上，当(1)由于去封装或去分层而产生振动能量和(2)由于去焊接或去分层而产生热量时，产生电压。电压（由去包装或去分层引起的振动引起）击穿了另一种压电薄膜，这种压电薄膜用于建立在硅衬底上的被动表面声波（SAW）谐振器，在SAW谐振器上留下永久标记，不再作为谐振器工作，从而永久记录篡改活动。声表面波谐振器用无线射频信号进行询问。

This research explores the feasibility of a submillimeter-sized, battery-less, tamper detecting chip that can be placed inside a semiconductor package through a droplet ejector, and which can be interrogated wirelessly from the outside of the semiconductor package for detecting any recorded tampering activity. The research paves foundational technology for a paradigm-shifting concept of individualized detection and recording of tampering activities to ensure authenticity of semiconductor chips. Also, the packaging technology based on a droplet ejector opens up a brand-new packaging approach for semiconductor chips. Thus, the research greatly impacts many industries including semiconductor industry.The research is to study the feasibility of a single-chip detector that (1) can record any invasive semiconductor-chip-package tampering activity without need of a battery, (2) can be placed inside semiconductor chip packages through a nozzleless droplet ejector, and (3) can be wirelessly interrogated without need to open up the semiconductor package. With a piezoelectric film supported on a non-piezoelectric cantilever with a proof mass at its free end, electrical voltage is generated (1) when there is vibrational energy due to de-packaging or de-layering and (2) when there is heat due to de-soldering or de-layering. The electrical voltage (induced by vibration due to de-packaging or de-layering) breaks down another piezoelectric film used for a passive Surface Acoustic Wave (SAW) resonator built on a silicon substrate, leaving a permanent mark on the SAW resonator, which no longer works as a resonator, thus permanently recording the tampering activity. The SAW resonator is interrogated wirelessly with radio frequency signal.