Research on Micromechanics and Micromagnetics Based on X-rayLithography and Electrodeposition of Metal Structures

拟议的研究旨在利用在LIGA工艺制造微电子机械系统(MEMS)的开发中认识到的机会。潜在的商业技术转让提供了方向，包括改进传感器的MEMS和创造新的设备类别。拟议研究的很大一部分是用于MEMS的磁学技术。设计方法和约束将通过电镀磁性结构进行分析。电池设计的线性磁致动器将是主要的测试车辆。重点将涉及单位芯片面积输出力的考虑、速度和位置精度以及控制电子设备。旋转的磁电机将采用兼容的齿轮箱。还将研究新的微型传感器，如磁性接近传感器。

The proposed research is intended to exploit opportunities recognized in the development of the LIGA process for fabrication of microelectromechanical systems (MEMS). Direction is provided by potential commercial technology transfer, including improved MEMS for sensors and the creation of new classes of devices. A significant portion of the proposed research is in magnetics technology for MEMS. Design methods and constraints will be analyzed via electroplated magnetic structures. A cell designed linear magnetic actuator will be the primary test vehicle. The emphasis will involve output force per unit chip area considerations, speed and positional accuracy, as well as control electronics. Rotating magnetic motors will be constructed with compatible gear boxes. New microsensors such as magnetic proximity sensors will also be investigated.