Soft X-ray Diffraction Plate

本研究将评估一种新的软x射线光学（软x射线衍射板，SXDP），它类似于可见光中的扩散器。因为它可以消除聚光光学和增加光子通量，它将是一个有用的光学元件，在光学常数使折射率和反射光学元件困难。第一个应用，在第二阶段，将是改进成像软x射线显微镜（ISXM），使这种显微镜更坚固和商业上可行的仪器。我们预计进一步的应用将在照明均匀性和保持通量至关重要的领域发展。非均匀源的x射线光谱学和投影软x射线光刻技术将首先受益。SXDP由一个不透明的薄膜和许多小孔组成，其大小与x射线的波长相当。这种新型的x射线光学装置可以将通过ISXMs的通量提高一个数量级，并提供良好的数值孔径匹配。这种光学将有助于紧凑型ISXM的商业发展。在第一阶段，使用分析和计算机技术的SXDP模型将决定哪种制造方法可以生产最佳的SXDP，并通过将数据与理论进行比较来评估其性能。

This research will evaluate a new soft X-ray optic (a Soft X-ray Diffraction Plate, SXDP) which is analogous to a diffuser in the visible. Because it can eliminate condenser optics and increase photon flux, it will be a useful optic wherever optical constants make refractive and reflective optical elements difficult. The first application, in Phase II, will be to improve imaging soft X-ray microscopy (ISXM), making such microscopes more robust and commercially viable instruments. We anticipate further applications will develop in areas where uniformity of illumination and preservation of flux are crucial. X-ray spectroscopy of inhomogeneous sources and projection soft X-ray lithography will be among the first to benefit. The SXDP consists of an opaque film with a multitude of small holes, whose size is comparable to the wavelength of the X-rays. This novel X-ray optic may improve flux through ISXMs by an order of magnitude and provide good numerical aperture matching. This optic will contribute to the commercial development of a compact ISXM. In Phase I, SXDP models, using analytical and computer techniques, will decide which manufacturing method will produce optimum SXDPs and evaluate their performance by comparing data with theory.