Research on Extreme Ultraviolet Microscopy and Holography

极紫外显微镜和全息术研究

• 批准号: 9224628
• 负责人: James Young
• 金额: --
• 依托单位: William Marsh Rice University
• 依托单位国家: 美国
• 项目类别: Continuing grant
• 财政年份: 1993
• 资助国家: 美国
• 起止时间: 1993-09-15 至 1997-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9224628&HistoricalAwards=false
• 关键词: Research; Extreme; Ultraviolet; Microscopy; Holography

9224628 Young Microscopy using extreme ultraviolet and soft x-ray radiation offers high resolution, high contrast, and chemical sensitivity. Holographic imaging, now possible because of advances in short wavelength lasers, is unique in its potential to achieve true wavelength-limited resolution because it eliminates optical elements and their imperfections. In addition, holography records valuable phase and depth information. This program focuses on developing imaging techniques that can achieve wavelength-limited resolution regardless of the illuminationg wavelength. Such flexibility will enable application to many problems using a variety of sources, and the imaging capabilities will advance along with new short wavelength source developments. The scientific information necessary for imaging at wavelenths shorter than about 200m, and particularly for developing a holographic microscope, will be pursued in a three phase research program. First, laser-produced plasma sources and lasers will be used to measure the optical properties of recording films and typical object materials in the 200nm to 30nm region, where little information is currently available. This information is required to guide the development of new films, to choose optimum illuminating wavelenghts, and to interpret images. Next, techniques for high resolution contact microscopy will be developed, using the new films and atomic force microscope readout. Images of test objects at various wavelenghts will be used to asses and verify film performance and image interpretation algorithms. Contact microscopy is a proven high resolution technique, and it will be extended to imaging real objects. Finallly, with this background, the problems of reading high resolution holograms and numerically reconstructing faithful images will be investigated. *** v s t _ 0 , , c ) 0 , , Õ # _ 0 , , ) 0 , 9224628 Young Microscopy using extreme ultraviolet and soft x-ray radiation offers high resolution, high contrast, and chemica { $ $ $ ( F / = = / 1 Courier Symbol & Arial 5 Courier New = " h E E E 8 I R:\WW20USER\ABSTRACT.DOT Cassandra Queen Cassandra Queen

9224628杨氏显微镜使用极端紫外线和软X射线辐射，具有高分辨率、高对比度和化学敏感性。由于短波长激光的进步，全息成像现在成为可能，其独特之处在于它具有实现真正的波长受限分辨率的潜力，因为它消除了光学元件及其缺陷。此外，全息术还记录了有价值的相位和深度信息。这个项目的重点是开发成像技术，无论照明波长如何，都可以实现波长有限的分辨率。这种灵活性将使其能够使用各种光源解决许多问题，成像能力将随着新的短波长源的发展而进步。短于200米波长的成像所需的科学信息，特别是开发全息显微镜所需的科学信息，将在三个阶段的研究计划中进行探索。首先，激光产生的等离子体源和激光将用于测量200纳米至30纳米范围内记录膜和典型物体材料的光学性质，目前可获得的信息很少。这些信息是指导新胶片开发、选择最佳照明波长和解释图像所必需的。下一步，将开发高分辨率接触显微镜技术，使用新的薄膜和原子力显微镜读数。测试对象在不同波长下的图像将被用来评估和验证胶片性能和图像解释算法。接触显微镜是一种经过验证的高分辨率技术，它将扩展到对真实物体进行成像。最后，在此背景下，研究了读取高分辨率全息图和数值再现逼真像的问题。*v S t_0，，c)0，‘#_0，，)0,9224628青年显微镜使用极端紫外线和软X射线辐射提供高分辨率，高对比度，和化学{$(F/==/1信使符号&amp；Arial 5 Courier New=“h E 8 I R：\WW20USER\ABSTRACT.DOT Cassandra Queen Cassandra Queen