Research on Extreme Ultraviolet Microscopy and Holography

9224628 Young显微镜使用极紫外线和软x射线辐射提供高分辨率，高对比度和化学灵敏度。由于短波激光的进步，全息成像现在成为可能，它在实现真正的波长限制分辨率方面具有独特的潜力，因为它消除了光学元件及其缺陷。此外，全息记录了有价值的相位和深度信息。该计划的重点是开发成像技术，可以实现波长限制的分辨率，而不管照明波长。这种灵活性将使应用于使用各种光源的许多问题，并且成像能力将随着新的短波光源的发展而提高。波长小于200米的成像所需的科学信息，特别是全息显微镜的研制，将分三个阶段进行研究。首先，激光产生的等离子体源和激光器将用于测量记录薄膜和典型物体材料在200nm至30nm区域的光学特性，目前在该区域的信息很少。这些信息是需要指导新电影的发展，选择最佳的照明波长，并解释图像。接下来，高分辨率接触显微镜技术将被开发，使用新的薄膜和原子力显微镜读出。测试对象在不同波长的图像将被用来评估和验证薄膜性能和图像解释算法。接触显微镜是一种经过验证的高分辨率技术，它将扩展到真实物体的成像。最后，在此背景下，研究了高分辨率全息图的读取和忠实图像的数字重建问题。*** v st _ 0,, c) 0,， Õ # _ 0,,) 0, 9224628 Young显微术使用极紫外和软x射线辐射提供高分辨率，高对比度，和chemica{$ $ $ (F / = = / 1 Courier Symbol & Arial 5 Courier New = " h E E E 8 I R:\WW20USER\ABSTRACT。卡桑德拉·奎恩卡桑德拉·奎恩

9224628 Young Microscopy using extreme ultraviolet and soft x-ray radiation offers high resolution, high contrast, and chemical sensitivity. Holographic imaging, now possible because of advances in short wavelength lasers, is unique in its potential to achieve true wavelength-limited resolution because it eliminates optical elements and their imperfections. In addition, holography records valuable phase and depth information. This program focuses on developing imaging techniques that can achieve wavelength-limited resolution regardless of the illuminationg wavelength. Such flexibility will enable application to many problems using a variety of sources, and the imaging capabilities will advance along with new short wavelength source developments. The scientific information necessary for imaging at wavelenths shorter than about 200m, and particularly for developing a holographic microscope, will be pursued in a three phase research program. First, laser-produced plasma sources and lasers will be used to measure the optical properties of recording films and typical object materials in the 200nm to 30nm region, where little information is currently available. This information is required to guide the development of new films, to choose optimum illuminating wavelenghts, and to interpret images. Next, techniques for high resolution contact microscopy will be developed, using the new films and atomic force microscope readout. Images of test objects at various wavelenghts will be used to asses and verify film performance and image interpretation algorithms. Contact microscopy is a proven high resolution technique, and it will be extended to imaging real objects. Finallly, with this background, the problems of reading high resolution holograms and numerically reconstructing faithful images will be investigated. *** v s t _ 0 , , c ) 0 , , Õ # _ 0 , , ) 0 , 9224628 Young Microscopy using extreme ultraviolet and soft x-ray radiation offers high resolution, high contrast, and chemica { $ $ $ ( F / = = / 1 Courier Symbol & Arial 5 Courier New = " h E E E 8 I R:\WW20USER\ABSTRACT.DOT Cassandra Queen Cassandra Queen