Substitution of Liquid Carbon Dioxide for Chlorofluorocarbon

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The concept of momentum transfer is used for removal of submicron particulates by supplying droplets of solvent at high velocity. In particular, liquid carbon dioxide is substituted for formerly used solvents (CFCs) to achieve enhanced ultracleaning lower costs than in other substitute technologies, while removing CFCs from use, as required by the terms of the Montreal Protocol. Experimental work varying conditions of operation, using specular surfaces as test objects and optical methods of documenting results will be used to optimize the procedure and compare results with alternative technologies. Existing, commercial embodiments of the core technology will be retrofitted for early use of findings in industry.