Momentum Transfer Technology and CFC Solvent Replacement for Removal of Particulates

小行星9360430 提出了一种新的技术来调节溶剂喷雾或射流的速度，以增强所产生的液滴将动量传递给表面上的颗粒污染物的能力。亚微米污染，否则难以消除的是强调。 二氧化碳喷雾剂将用于这项研究，作为目前正在逐步淘汰使用的氟氯化碳溶剂的替代品。 除了满足1990年《清洁空气法》的环境要求外，这种替代技术还有望提高性能和运行经济性。 该研究已应用于硅晶片和半导体设备，其他洁净室组件，硬盘驱动器和信息存储磁盘，打印引擎鼓和复印机的清洁。 ***

9360430 Williford A new technology is proposed to adjust the velocity of sprays or jets of solvent, in order to augment the ability of the resulted droplets to transfer momentum to particulate contamination on surfaces. Submicron contamination, otherwise difficult to remove is emphasized. Carbon dioxide sprays will be used in this research as replacements for CFC solvent now being phased out of use. In addition to meeting environmental demands of the Clear Air Act of 1990, this replacement technology shows promise of improved performance and operating economics. The research has application to cleaning of silicon wafers and semiconductors devices, other cleanroom components, hard drives and information storage disks, drums for printing engines, and photocopiers. ***