Momentum Transfer Technology and CFC Solvent Replacement for Removal of Particulates

动量传递技术和 CFC 溶剂替代去除颗粒

• 批准号: 9360430
• 负责人: John Williford
• 金额: $ 6.49万
• 依托单位: JWA Division, Emadel Enterprises, Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-01-01 至 1994-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9360430&HistoricalAwards=false
• 关键词: Momentum; Transfer; Technology; CFC; Solvent

9360430 Williford A new technology is proposed to adjust the velocity of sprays or jets of solvent, in order to augment the ability of the resulted droplets to transfer momentum to particulate contamination on surfaces. Submicron contamination, otherwise difficult to remove is emphasized. Carbon dioxide sprays will be used in this research as replacements for CFC solvent now being phased out of use. In addition to meeting environmental demands of the Clear Air Act of 1990, this replacement technology shows promise of improved performance and operating economics. The research has application to cleaning of silicon wafers and semiconductors devices, other cleanroom components, hard drives and information storage disks, drums for printing engines, and photocopiers. ***

9360430威廉·福特提出了一项新技术，以调整喷雾或溶剂喷射的速度，以增强所产生的液滴将动量转移到表面颗粒污染的能力。强调亚微米级的污染，否则很难去除。二氧化碳喷雾将在这项研究中用作目前逐步淘汰的氯氟化碳溶剂的替代品。除了满足1990年《清洁空气法》的环境要求外，这种替代技术还显示出改善性能和运营经济性的前景。这项研究适用于清洁硅片和半导体设备、其他洁净室部件、硬盘驱动器和信息存储磁盘、打印引擎的滚筒和复印机。***