A Pattern-Deviation Scanner for Precise Measurement of Internal Component Locations

用于精确测量内部元件位置的模式偏差扫描仪

• 批准号: 9261267
• 负责人: William Dunn
• 金额: $ 4.99万
• 依托单位: Quantum Research Services, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1993
• 资助国家: 美国
• 起止时间: 1993-01-01 至 1993-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9261267&HistoricalAwards=false
• 关键词: Pattern; Deviation; Scanner; Precise; Measurement

This proposal will investigate the feasibility of measuring to very high resolution (+200 microns) the locations of multiple components of known composition whose positions are intended to conform to a well-defined pattern inside a structure. The proposed technique relies on scanning photon beams across the structure surface, detecting transmitted and scattered radiation in collimated detectors, and employing techniques such as template-matching that incorporate a priori information such as size and composition of the components and their intended pattern. A combined experimental and theoretical investigation is undertaken to study design issues such as source energy, source and detector collimation, scan mode, scan step size and speed, and required number of detectors and their locations for a practical instrument.

本提案将调查测量的可行性， 非常高的分辨率（+200微米）的多个位置 其位置旨在 符合一个结构内部定义明确的模式。 的 所提出的技术依赖于扫描光子束穿过 结构化表面，检测透射和散射辐射 在准直探测器中，并采用诸如 模板匹配结合了先验信息， 组件的尺寸和组成及其预期用途 格局 实验与理论相结合的研究 是研究设计问题，如能源， 源和探测器准直、扫描模式、扫描步长以及 速度，以及所需的探测器数量及其位置， 实用工具。