Photo-Electroforming: A New Manufacturing Process for Micro-Electro-Mechanical Systems

Sachs光电成形是一种直接从计算机模型制造高精度微机电器件的新工艺。提出的工作的动机是为微机电系统社区提供一种专门为微机电（MEM）应用开发的制造方法。目标之一是提供具有独特机械、电气和电磁特性的亚毫米材料组件，这将允许制造新的MEM器件。第二个目标是提供几乎任意3-D几何形状的MEM器件，同时最小化增加几何复杂性的代价。＊＊＊

9312234 Sachs Photo-Electroforming is a new process for the fabrication of high-precision micro-electro-mechanical devices directly from computer models. The motivation of the proposed work is to provide to the Mirco-Electro-Mechanical Systems community a fabrication method which is developed specifically for Micro-Electro-Mechanical (MEM) applications. One goals is to provide sub-millimeter components of materials with unique mechanical, electrical and electromagnetic properties which will allow for the fabrication of new MEM devices. A second goal is to provide MEM devices of almost arbitrary 3-D geometry with minimal penalty for increased geometric complexity. ***