Photo-Electroforming: A New Manufacturing Process for Micro-Electro-Mechanical Systems

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9312234 Sachs Photo-Electroforming is a new process for the fabrication of high-precision micro-electro-mechanical devices directly from computer models. The motivation of the proposed work is to provide to the Mirco-Electro-Mechanical Systems community a fabrication method which is developed specifically for Micro-Electro-Mechanical (MEM) applications. One goals is to provide sub-millimeter components of materials with unique mechanical, electrical and electromagnetic properties which will allow for the fabrication of new MEM devices. A second goal is to provide MEM devices of almost arbitrary 3-D geometry with minimal penalty for increased geometric complexity. ***