A Kinetics-Based Investigation of the Hall-Petch Effect and Solid Solution Strengthening in Refractory Metal Coatings

基于动力学的难熔金属涂层中霍尔-佩蚀效应和固溶强化研究

• 批准号: 9317479
• 负责人: Donald Stone
• 金额: $ 26.5万
• 依托单位: University of Wisconsin-Madison
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-05-01 至 1998-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9317479&HistoricalAwards=false
• 关键词: Kinetics; Based; Investigation; Hall; Petch

9317479 Stone Strengthening mechanisms in molybdenum and tantalum/nitrogen thin films are explored using unique indentation apparatus. The film compositions are selected as model systems to examine solid solution strengthening and the Hall-Petch effect. Film thicknesses on the order of 2 to 5 microns are deposited on hard substrates. Emphasis is placed on determining the effects of indentation rate and temperature on the hardness, as a function of grain size, alloy content, and structure form. The kinetics of plastic deformation are characterized by load and depth sensing techniques and wafer curvature stress measurements. Results should permit a determination of how well laws governing the kinetics of deformation in bulk materials relate to behavior in thin films. %%% The research will provide an improved understanding of deformation phenomena in hard coatings. This knowledge can lead to new strategies for depositing thin films to achieve improved properties. ***

9317479 使用独特的压痕装置探索了钼和钽/氮薄膜中的石材强化机制。 选择薄膜组合物作为模型系统来检查固溶强化和霍尔-佩奇效应。 在硬质基材上沉积厚度约为 2 至 5 微米的薄膜。 重点是确定压痕速率和温度对硬度的影响，作为晶粒尺寸、合金含量和结构形式的函数。 塑性变形的动力学通过负载和深度传感技术以及晶圆曲率应力测量来表征。 结果应该可以确定控制散装材料变形动力学的定律与薄膜行为的关系。 %%% 这项研究将加深对硬质涂层变形现象的理解。 这些知识可以带来沉积薄膜以实现改进性能的新策略。 ***