A Kinetics-Based Investigation of the Hall-Petch Effect and Solid Solution Strengthening in Refractory Metal Coatings

基于动力学的难熔金属涂层中霍尔-佩蚀效应和固溶强化研究

• 批准号: 9317479
• 负责人: Donald Stone
• 金额: $ 26.5万
• 依托单位: University of Wisconsin-Madison
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-05-01 至 1998-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9317479&HistoricalAwards=false
• 关键词: Kinetics; Based; Investigation; Hall; Petch

9317479 Stone Strengthening mechanisms in molybdenum and tantalum/nitrogen thin films are explored using unique indentation apparatus. The film compositions are selected as model systems to examine solid solution strengthening and the Hall-Petch effect. Film thicknesses on the order of 2 to 5 microns are deposited on hard substrates. Emphasis is placed on determining the effects of indentation rate and temperature on the hardness, as a function of grain size, alloy content, and structure form. The kinetics of plastic deformation are characterized by load and depth sensing techniques and wafer curvature stress measurements. Results should permit a determination of how well laws governing the kinetics of deformation in bulk materials relate to behavior in thin films. %%% The research will provide an improved understanding of deformation phenomena in hard coatings. This knowledge can lead to new strategies for depositing thin films to achieve improved properties. ***

9317479利用独特的压痕装置研究了钼和钽/氮薄膜的结石强化机制。选择膜组分作为模型系统来考察固溶强化和Hall-Petch效应。薄膜厚度约为2到5微米，沉积在坚硬的衬底上。重点确定了压痕速度和温度对硬度的影响，作为晶粒度、合金含量和组织形式的函数。通过载荷和深度传感技术以及晶片曲率应力测量来表征塑性变形的动力学。结果应该能够确定控制块状材料中变形动力学的定律与薄膜中的行为有多好的关系。%这项研究将有助于更好地理解硬质涂层中的变形现象。这一知识可以为沉积薄膜带来新的策略，以实现更好的性能。***