Polymer Based Piezoresistive Sensors

基于聚合物的压阻传感器

• 批准号: 9362010
• 负责人: Mary Moss
• 金额: $ 6.5万
• 依托单位: Brewer Science, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-02-15 至 1994-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9362010&HistoricalAwards=false
• 关键词: Polymer; Based; Piezoresistive; Sensors

9362010 Moss Piezoresistive properties of materials form the basis of many types of sensors, including strain gauges, micromachined accelerometers and pressure sensors, tactile sensor, and flow sensors. As greater demands are placed on devices from the standpoint of size and cost per controlled point, easier methods of processing which can produce smaller devices with greater performance are required. Brewer Science has developed a processable polyaniline, as well as conductive, ion implanted polymer films. Much of this prior work was performed in collaboration with Southwest Missouri State University, who is subcontractor in the proposed work. Preliminary investigations indicate that devices constructed from ion implanted polymers may have particular advantages over devices using ceramic, metallic, crystalline silicon and carbon-filled materials. These advantages include improved radiation hardness, greater flexibility and range of travel, low manufacturing cost, abrasion resistance, and environmental inertness. The polyaniline-based sensors are easily deposited onto the substrate and can be patterned to small or large goemetries by standard photolithographic procedures. These materials have potential in the micromachining industry because of the high quality of the films that are produced on a micro-scale (1 micron), and their ease of processing. In the proposed work, we will determine the feasibility of using the soluble polyanilines and ion implanted films for piezoresistive devices. Specific goals of this research are to determine the piezoresistive gauge factor, to minimize temperature effects, to improve environmental stability, and to construct prototypes of a precision laboratory weight scale and a vacuum/pressure sensor based upon devices made from these materials. ***

Moss材料的压阻特性构成了许多类型传感器的基础，包括应变计、微机械加速度计和压力传感器、触觉传感器和流量传感器。由于从尺寸和每个控制点成本的角度对设备提出了更高的要求，因此需要更简单的加工方法来生产具有更高性能的更小的设备。布鲁尔科学已经开发出一种可加工的聚苯胺，以及导电，离子注入聚合物薄膜。之前的大部分工作都是与西南密苏里州立大学合作完成的，该大学是拟议工作的分包商。初步研究表明，由离子注入聚合物构建的器件可能比使用陶瓷、金属、晶体硅和碳填充材料的器件具有特别的优势。这些优点包括改进的辐射硬度、更大的灵活性和行程范围、更低的制造成本、耐磨性和环境惰性。基于聚苯胺的传感器很容易沉积在衬底上，并且可以通过标准光刻程序形成小尺寸或大尺寸的图案。这些材料在微机械加工工业中具有潜力，因为在微尺度（1微米）上生产的薄膜质量高，而且易于加工。在本研究中，我们将确定在压阻器件中使用可溶性聚苯胺和离子注入膜的可行性。本研究的具体目标是确定压阻测量因子，最大限度地减少温度影响，提高环境稳定性，并基于这些材料制成的设备构建精密实验室重量秤和真空/压力传感器的原型。＊＊＊