SGER: Laser Micromachining of Submillimeter Waveguide Components

SGER：亚毫米波导元件的激光微加工

• 批准号: 9414468
• 负责人: Christopher Walker
• 金额: $ 5万
• 依托单位: University of Arizona
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-05-15 至 1995-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9414468&HistoricalAwards=false
• 关键词: SGER; Laser; Micromachining; Submillimeter; Waveguide

9414468 Walker Obstacles encountered in designing low noise, high efficiency, heterodyne receivers and local oscillator (LO) sources at submillimeter wavelengths include the quality and cost of waveguide structures. At wavelengths shorter than 400 um, rectangular waveguide structures, feedhorns, and backshorts become prohibitively difficult to fabricate using standard machining techniques. Silicon micro-machining techniques will be used to fabricate high quality waveguide structures and components for use at submillimeter wavelengths. The objective of this project is to develop the technology necessary to construct high efficiency, low-cost heterodyne array receivers and signal sources which operate into the terahertz frequency range. Silicon laser etching will be demonstrated by constructing and testing silicon micromachined waveguide mixer arrays for use at 492 and 850 GHz. These arrays will be built in collaboration with the Max Planck Institute for Radio Astronomy. ***

9414468沃克在设计低噪声、高效率、外差接收器和亚毫米波长的本地振荡器(LO)源时遇到的障碍包括波导结构的质量和成本。在波长小于400微米的情况下，使用标准加工技术制造矩形波导结构、馈电喇叭和反短路变得极其困难。硅微机械加工技术将被用于制造用于亚毫米波长的高质量波导结构和组件。该项目的目标是开发构建高效率、低成本的外差阵列接收器和信号源所需的技术，这些接收器和信号源的工作频率范围为太赫兹。硅激光刻蚀将通过构建和测试用于492 GHz和850 GHz的硅微机械波导混合器阵列来演示。这些阵列将与马克斯·普朗克射电天文学研究所合作建造。***