A High-Gradient Electron Injector for X-Ray Chip Lithography and Microfabrication

用于 X 射线芯片光刻和微加工的高梯度电子注入器

• 批准号: 9461156
• 负责人: David U. Yu
• 金额: $ 7.5万
• 依托单位: DULY Research Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-01-01 至 1996-02-29
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9461156&HistoricalAwards=false
• 关键词: Gradient; Electron; Injector; Ray; Chip

A method is proposed to enable full-energy injection in an x-ray lithography machine used for etching future high-density computer chips and microelectromechanical systems (MEMS). A high-gradient accelerator, which utilizes a high-power microwave source to drive electrons through a linear accelerating structure, can be used as a full-energy injector to an x-ray superconducting synchrotron radiation ring (SSRR), or to a granular e-beam driven x-ray source. Examples of microwave sources capable of producing the high power needed to drive the HGA are a relativistic klystron, a high-power X-band klystron combined with an rf pulse compression system, a sheet-beam klystron or a cluster klystron. Full-energy injection increases the stored current in the SSRR by eliminating energy ramp-up of electrons in the SSRR, a main source of current loss during injection. Higher stored current generates more intense x-rays, which in turn reduces the exposure time and increases the throughput, thus saving the unit cost of production. Development of the method and apparatus of an integrated system combining a full-energy HGA injector and the SSRR technologies is the main thrust of the present NSF SBIR project. Technical issues to be addressed in Phase I include continued R&D on the rf power source, feasibility of gridded gun modulation at the rf frequency of the ring, design of the septum and kicker magnets for high-energy injection, and optimization of the injection beamline layout in relation to the x-ray beamlines to minimize interference in a compact space.

提出了一种在用于蚀刻未来高密度计算机芯片和微电子机械系统(MEMS)的X射线光刻机中实现全能量注入的方法。高梯度加速器利用高功率微波源驱动电子通过线性加速结构，可用作X射线超导同步辐射环(SSRR)或粒状电子束驱动X射线源的全能量注入器。能够产生驱动HGA所需的高功率的微波源的例子有相对论速调管、结合射频脉冲压缩系统的高功率X波段速调管、片束速调管或集束速调管。全能量注入通过消除SSRR中电子的能量上升来增加SSRR中存储的电流，SSRR是注入过程中电流损失的主要来源。存储电流越大，产生的X射线越强，这反过来又减少了曝光时间，增加了产量，从而节省了单位生产成本。开发将全能量HGA喷射器和SSRR技术相结合的集成系统的方法和设备是目前NSF SBIR项目的主旨。第一阶段要解决的技术问题包括射频电源的持续研发、在环的射频下进行栅格化电子枪调制的可行性、用于高能注入的隔膜和Kicker磁铁的设计，以及与X射线光束线相关的注入光束线布局的优化，以最大限度地减少在紧凑空间中的干扰。