Monolithic Deformable Mirror

单片变形镜

• 批准号: 9461560
• 负责人: Mark Miles
• 金额: $ 6.49万
• 依托单位: Etalon Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-01-01 至 1995-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9461560&HistoricalAwards=false
• 关键词: Monolithic; Deformable; Mirror

This Small Business Innovation Research Phase I project will utilize surface micromachining techniques to fabricate a low-cost Deformable Mirror (DM). Despite steady improvements in performance, current DMs remain prohibitively expensive. Present devices continue to cost upwards of one thousand dollars per actuator. This is due primarily to manufacturing schemes which rely on precision machining or precision assembly of large numbers of components. Etalon, Inc. proposes a fabrication process which has already proven the potential of reducing costs by at least an order of magnitude. The process relies on a novel microfabrication process to fabricate large area deformable structures monolithically, i.e., as a single component. Using deposited and grown dielectric films, an electrostatically driven membrane mirror can be fabricated with great precision and reliability on an optically finished substrate. No conventional machining is required, and batch production is facilitated. This effort will investigate some of the issues posed by this process, perform an elaborate computer simulation using specialized finite element analysis software, and evaluate the performance of the proposed devices.

这个小企业创新研究第一阶段项目将利用表面微加工技术制造低成本的可变形镜（DM）。尽管性能稳步提高，目前的DM仍然昂贵得令人望而却步。目前的装置每个致动器的成本持续在一千美元以上。这主要是由于依赖于大量部件的精密加工或精密组装的制造方案。Etalon公司提出了一种制造工艺，该工艺已经被证明具有降低成本至少一个数量级的潜力。该工艺依赖于新颖的微制造工艺来单片地制造大面积可变形结构，即，作为一个单一的组成部分。使用沉积和生长的介电膜，可以在光学抛光的衬底上以高精度和可靠性制造静电驱动膜反射镜。不需要传统的机械加工，便于批量生产。这项工作将调查这一过程中提出的一些问题，使用专门的有限元分析软件进行详细的计算机模拟，并评估所提出的设备的性能。