Monolithic Deformable Mirror

单片变形镜

• 批准号: 9461560
• 负责人: Mark Miles
• 金额: $ 6.49万
• 依托单位: Etalon Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-01-01 至 1995-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9461560&HistoricalAwards=false
• 关键词: Monolithic; Deformable; Mirror

This Small Business Innovation Research Phase I project will utilize surface micromachining techniques to fabricate a low-cost Deformable Mirror (DM). Despite steady improvements in performance, current DMs remain prohibitively expensive. Present devices continue to cost upwards of one thousand dollars per actuator. This is due primarily to manufacturing schemes which rely on precision machining or precision assembly of large numbers of components. Etalon, Inc. proposes a fabrication process which has already proven the potential of reducing costs by at least an order of magnitude. The process relies on a novel microfabrication process to fabricate large area deformable structures monolithically, i.e., as a single component. Using deposited and grown dielectric films, an electrostatically driven membrane mirror can be fabricated with great precision and reliability on an optically finished substrate. No conventional machining is required, and batch production is facilitated. This effort will investigate some of the issues posed by this process, perform an elaborate computer simulation using specialized finite element analysis software, and evaluate the performance of the proposed devices.

这个小型企业创新研究阶段I项目将利用表面微加工技术来制造低成本可变形镜（DM）。尽管性能稳步提高，但当前的DMS仍然非常昂贵。目前的设备继续每台执行器的成本超过一千美元。这主要是由于制造方案依赖于大量组件的精确加工或精确组装。 Etalon，Inc。提出了一个制造过程，该工艺已经证明了至少将成本降低的潜力。该过程依赖于新型的微加工过程来单层形成大面积可变形的结构，即作为单个成分。使用沉积和生长的介电膜，可以在光学完成的底物上精确地和可靠性来制造静电驱动的膜镜。不需要常规的加工，并且可以促进批处理生产。这项工作将调查此过程提出的一些问题，使用专门的有限元分析软件进行精细的计算机模拟，并评估所提出的设备的性能。