Development of hard deformable focusing mirror for general-purpose hard X-ray optics.

通用硬X射线光学器件硬变形聚焦镜的开发。

• 批准号: 23860001
• 负责人: KIMURA Takashi
• 金额: $ 1.83万
• 依托单位: Hokkaido University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Research Activity Start-up
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011 至 2012
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-23860001/
• 关键词: X 線光学; 超精密加工; 超精密計測; 計測工学; X線集光; X線ミラー; 補償光学; 波面制御; 収差補正; 形状可変ミラー; 圧電素子

In order to realize diffraction-limited focusing of hard X-rays with a size less than several hundreds of nanometers, a deformable mirror which can be bent into an aspherical shape with a depth of several micrometers and an accuracy better than a few nanometers was developed. The accuracy of the mirror surface shape was guaranteed and maintained by a feedback system with a Fizeau interferometer. Hard X-ray focusing performance of the mirror was tested at the BL29XUL of SPring-8. We confirmed that beam size was controllable in a range from micrometer to nanometer scale under diffraction-limited focusing condition.

为了实现对尺寸小于几百纳米的硬X射线的衍射极限聚焦，研制了一种可弯曲成深度为几微米、精度优于几纳米的非球面形状的变形镜。采用斐索干涉仪作为反馈系统，保证了镜面形状的精度。在SPring-8的BL 29 XUL上测试了反射镜的硬X射线聚焦性能。证实了在衍射极限聚焦条件下，光束尺寸在微米到纳米尺度范围内是可控的。

项目成果

Development of Structure Analysis Method for Non-crystallized Sample

非晶样品结构分析方法的开发

• 发表时间: 2012
• 作者: 盧文剣;清水裕樹;高偉;Takashi Kimura;Takashi Kimura
• 通讯作者: Takashi Kimura

Development of Structure Analysis Method for Non-crystallized Sample using Focused X-ray Free Electron Laser

聚焦X射线自由电子激光非晶样品结构分析方法的开发

• 发表时间: 2012
• 作者: T. Kimura;S. Matsuyama;Y.Nishino;K. Yamauchi
• 通讯作者: K. Yamauchi

Computational Study of Novel X-ray Focusing Optics with Zooming Function for X-ray Diffraction Microscopy

X射线衍射显微镜中具有变焦功能的新型X射线聚焦光学器件的计算研究

• 发表时间: 2012
• 作者: T. Kimura;S. Matsuyama;K.Yamauchi;Y. Nishino
• 通讯作者: Y. Nishino

Determination of Had X-ray Focusing Mirror Aberration using Phase Retrieval with Transverse Translation Diversity

使用横向平移分集相位检索确定 X 射线聚焦镜像差

• 发表时间: 2011
• 作者: H. Yokoyama;T. Kimura;H.Mimura;S. Imai;S. Matsuyama;Y. Kohmura;T. Ishikawa;K. Yamauchi
• 通讯作者: K. Yamauchi

Development of an ultra-precise deformable mirror for hard X-ray nanofocusing

开发用于硬X射线纳米聚焦的超精密变形镜

• 发表时间: 2011
• 作者: H. Nakamori;S. Matsuyama;T.Kimura;S. Imai;Y. Kohmura;T. Ishikawa;Y. Nishino;K. Ymauchi
• 通讯作者: K. Ymauchi