Monitoring and Enhancing Molecular Beam Epitaxy Using Low-Energy Ion Scattering

使用低能离子散射监测和增强分子束外延

• 批准号: 9523553
• 负责人: Scott Barnett
• 金额: $ 32.74万
• 依托单位: Northwestern University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-09-01 至 1999-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9523553&HistoricalAwards=false
• 关键词: Monitoring; Enhancing; Molecular; Beam; Epitaxy

9523553 Barnett This research project investigates the kinetic processes and microstructure which occur as a result of glancing angle low energy ion irradiation during MBE growth. Studies of angle-dependent ion damage generation are used to develop new approaches to surface modification, and the use of in-situ ion scattering spectroscopy as a non-destructive analytic technique. The research also includes efforts to modify surface morphology in island growth, and explores research ideas related to selective epitaxy. Electrical, optical and structural characterization will be used throughout the research to evaluate the films. %%% The primary goal of this research project is to establish greater basic understanding of particular phenomena relevant to thin film synthesis and processing through the study of glancing angle low energy ion irradiation during molecular beam epitaxy, and to relate this understanding to the development of advanced microelectronics devices through modifications in processing methods. Additionally, an important feature of the program is the training of graduate and undergraduate students in a fundamentally and technologically significant area. The knowledge and understanding gained from this research project is expected to contribute generally to improving the performance of advanced devices used in computing, information processing, and telecommunications. ***

本研究项目探讨了由于掠角低能离子辐照在MBE生长过程中所产生的动力学过程和微观结构。角依赖离子损伤产生的研究用于开发表面改性的新方法，并使用原位离子散射光谱作为一种无损分析技术。该研究还包括在岛屿生长中改变表面形态的努力，并探索与选择性外延相关的研究思路。在整个研究过程中，将使用电学、光学和结构表征来评估薄膜。本研究项目的主要目标是通过研究分子束外延过程中的掠角低能离子照射，对与薄膜合成和加工有关的特定现象建立更大的基本认识，并通过改进加工方法将这种认识与先进微电子器件的发展联系起来。此外，该计划的一个重要特点是在一个基础和技术上重要的领域培养研究生和本科生。从这个研究项目中获得的知识和理解预计将有助于提高用于计算、信息处理和电信的先进设备的性能。＊＊＊