Electromigration Strain Gradients

电迁移应变梯度

• 批准号: 9530043
• 负责人: George Cargill
• 金额: $ 4.76万
• 依托单位: Columbia University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-04-15 至 1997-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9530043&HistoricalAwards=false
• 关键词: Electromigration; Strain; Gradients

9530043 Cargill This small grant for exploratory research (SGER) supports a study of strain and composition gradients associated with electromigration in passivated polycrystalline aluminum - 5% copper conductor lines. The objective is to apply a new experimental approach to the long standing problem of electromigration in order to improve understanding and test theories concerning the origins, control, and consequences of strain and composition distributions in polycrystalline metallization structures undergoing electromigration. The program integrates capillary optics with X-ray diffraction apparatus and energy dispersive X-ray detection. One of the challenges in the work is to achieve the necessary spatial resolution in microdiffraction measurements while having sufficient incident X-ray flux to make accurate diffraction measurements in a practical time period. %%% This research provides a demonstration of the approach described above, and should permit the first direct , spatially resolved measurements of strain gradients during electromigration in passivated conductor lines. It should advance scientific understanding and industrial design practice. ***

小行星9530043 这个探索性研究（SGER）的小补助金支持钝化多晶铝- 5%铜导线中与电迁移相关的应变和成分梯度的研究。其目的是应用一种新的实验方法来解决长期存在的问题，电迁移，以提高理解和测试理论的起源，控制和后果的应变和成分分布在多晶金属化结构进行电迁移。该计划将毛细管光学与X射线衍射仪和能量色散X射线检测相结合。 工作中的挑战之一是在微衍射测量中实现必要的空间分辨率，同时具有足够的入射X射线通量以在实际时间段内进行精确的衍射测量。 %这项研究提供了上述方法的演示，并应允许第一个直接的，空间分辨的应变梯度测量过程中的钝化导线的电迁移。 它应该促进科学认识和工业设计实践。 ***