Thin Film Deposition Using Nanoparticle Beams

使用纳米粒子束进行薄膜沉积

• 批准号: 9614882
• 负责人: Frank Urban
• 金额: --
• 依托单位: Florida International University
• 依托单位国家: 美国
• 项目类别: Continuing grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-06-01 至 2001-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9614882&HistoricalAwards=false
• 关键词: Thin; Film; Deposition; Using; Nanoparticle

9614882 Urban The overall objective of this research is to investigate thin film materials deposited from beams of nanoparticles (clusters), a fraction of which may be ionized and accelerated to the growing surface. There are three focus areas: synthesis of intense nanoparticle beams, nucleation and growth of thin films deposited from nanoparticle beams, and the modeling of both particle synthesis and subsequent film growth. In the area of synthesis, the objectives are to explore the limitations of the pure expansion method and build two new sources, using simple vaporization with gas aggregation and magnetron sputtering with gas-assisted aggregation. The prime objective in the thin film materials properties area is to fabricate films and investigate nanophase dependent properties of materials including magnetic and semiconductor materials. A second objective is to investigate films in which the nanoparticles are exploited to influence the film (microstructure, surface roughness, density, stresses, etc.) without preserving the particles, but rather by taking advantage of super-thermal condensation and transport properties of the beams of incident particles. The final focus area improves mathematical models of the nanoparticle synthesis process and the phenomena occurring as they arrive at the growing surface. This is carried out using existing molecular dynamics simulations. %%% This research has a direct impact on materials science, both in the development of nanophase thin films and in obtaining other novel film microstructures resulting from the unique transport, nucleation, and film growth mechanisms connected with nanoparticle depositing beams. ***

9614882 Urban本研究的总体目标是研究从纳米粒子束（簇）沉积的薄膜材料，其中一部分可以被电离并加速到生长表面。有三个重点领域：强纳米粒子束的合成，从纳米粒子束沉积的薄膜的成核和生长，以及粒子合成和随后的膜生长的建模。在合成领域，目标是探索纯膨胀方法的局限性，并建立两个新的来源，使用简单的蒸发与气体聚集和磁控溅射与气体辅助聚集。薄膜材料性质领域的主要目标是制造薄膜和研究材料（包括磁性和半导体材料）的纳米相相关性质。第二个目标是研究纳米颗粒被利用来影响膜（微观结构、表面粗糙度、密度、应力等）的膜。而不保留粒子，而是利用入射粒子束的超热凝聚和传输特性。最后的重点领域改进了纳米颗粒合成过程的数学模型和当它们到达生长表面时发生的现象。这是使用现有的分子动力学模拟进行的。这项研究对材料科学有直接的影响，无论是在纳米相薄膜的发展，并在获得其他新的薄膜微观结构，从独特的传输，成核和薄膜生长机制与纳米粒子沉积光束。***