Thin Film Deposition Using Nanoparticle Beams

9614882城市这项研究的总体目标是研究由纳米粒子束(团簇)沉积的薄膜材料，其中一部分可能被电离并加速到生长的表面。主要集中在三个领域：强纳米粒子束的合成，纳米粒子束沉积薄膜的成核和生长，以及粒子合成和随后的薄膜生长的模拟。在合成方面，目标是探索纯膨胀方法的局限性，并建立两个新的源，即使用简单的汽化与气体聚集和磁控溅射与气体辅助聚集。薄膜材料性能领域的主要目标是制备薄膜，并研究包括磁性材料和半导体材料在内的材料的纳米相特性。第二个目标是研究利用纳米颗粒来影响薄膜(微结构、表面粗糙度、密度、应力等)的薄膜。而是通过利用入射粒子束的超热冷凝和传输特性。最后一个焦点领域改进了纳米颗粒合成过程的数学模型，以及当它们到达生长表面时发生的现象。这是利用现有的分子动力学模拟进行的。这项研究对材料科学有着直接的影响，无论是在纳米相薄膜的开发方面，还是在获得其他新的薄膜微结构方面，都是由于与纳米粒子沉积光束相关的独特的传输、成核和薄膜生长机制。***

9614882 Urban The overall objective of this research is to investigate thin film materials deposited from beams of nanoparticles (clusters), a fraction of which may be ionized and accelerated to the growing surface. There are three focus areas: synthesis of intense nanoparticle beams, nucleation and growth of thin films deposited from nanoparticle beams, and the modeling of both particle synthesis and subsequent film growth. In the area of synthesis, the objectives are to explore the limitations of the pure expansion method and build two new sources, using simple vaporization with gas aggregation and magnetron sputtering with gas-assisted aggregation. The prime objective in the thin film materials properties area is to fabricate films and investigate nanophase dependent properties of materials including magnetic and semiconductor materials. A second objective is to investigate films in which the nanoparticles are exploited to influence the film (microstructure, surface roughness, density, stresses, etc.) without preserving the particles, but rather by taking advantage of super-thermal condensation and transport properties of the beams of incident particles. The final focus area improves mathematical models of the nanoparticle synthesis process and the phenomena occurring as they arrive at the growing surface. This is carried out using existing molecular dynamics simulations. %%% This research has a direct impact on materials science, both in the development of nanophase thin films and in obtaining other novel film microstructures resulting from the unique transport, nucleation, and film growth mechanisms connected with nanoparticle depositing beams. ***